Investigation of accuracy of aerostatic guideways

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1、ARTICLEINPRESSInternationalJournalofMachineTools&Manufacture49(2009)478–487ContentslistsavailableatScienceDirectInternationalJournalofMachineTools&Manufacturejournalhomepage:www.elsevier.com/locate/ijmactoolInvestigationofaccuracyofaerostaticguidewaysT.OnatEkinci,J.R.R.Mayer,GuyM.Cloutie

2、rE´colePolytechniquedeMontre´al,CP6079,Montre´al,Que´bec,CanadaH3C3A7articleinfoabstractArticlehistory:AerostaticguidewaysareoftenusedinmachinesrequiringveryhighmotionaccuracysuchasReceived18July2008coordinatemeasuringmachines.Currently,positioningerroranalysisforsuchmachinesfocusesontheR

3、eceivedinrevisedformrelationshipbetweenvolumetricerrorsononehandandaxes’motionerrorsandaxes’relativelocation13November2008errorsontheother.Theinternalmechanismscausingmotionerrorsarerarelyconsidered.InordertoAccepted8January2009gainadeeperunderstandingofaerostaticguideways,thispaperinvest

4、igatestherelationshipbetweenAvailableonline21January2009themotionerrorsoftheaxis’carriageandtheguideways’geometricerrorsbothmathematicallyandKeywords:experimentally.Theanalyticalmodelusesbearingslocationandstiffness,guidewaygeometryandstaticGuideways’geometricerrorsequilibriumtoproduceamo

5、delinmatrixform.ValidationexperimentsareconductedonamachineAxis’motionerrorsaxismovingonaerostaticguidewayswithandwithoutpreload.Volumetricerrors&2009ElsevierLtd.Allrightsreserved.CoordinatemeasuringmachinesMachinetoolsAirbearings1.Introductiononthecarriagemotionerrorsincludingelasticeffe

6、cts.Schlesinger[6]underlinedtheimportanceofguidewaystraightnesserrorsbyThemodellingofmachinevolumetricerrorsbasedontherecommendingerrorlimits.Inthefieldofcoordinatemeasuringsynthesisofaxismotionerrorsisacommontechniqueinthemachines(CMM)therearecommercialapplicationsoferrormachineerroranaly

7、sisfield[1,2].Itisintuitivelyunderstoodthatcompensationthattakeintoaccounttheguidanceerrors.theaxismotionerrorsareinturnrelatedtophysicalcausesHowever,theseguidanceerrorsaredefinedasthedeviationofdeeperinthemachinestructureandthedevelopmentofformalthecarriagefromarefe