FEMAG晶体生长模拟软件-如何将直拉法模拟技术拓展到区熔法生长.ppt

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1、FEMAG晶体生长模拟软件--HowtoextendCzmodelingtechniquestoFZgrowth?ModelingofFZgrowthFEMAGSoft©2013Globaltemperaturefield(left),meltflow(right),andalternatingmagneticfield(bottom)Quasi-steadysimulationoftheFloatingZone(FZ)growthofa100mmsiliconcrystal(1mm/minpullrate)Modeling

2、ofFZgrowth(cont’d)Turbulentviscosityislowandthemeltflowcanbecomputedbymeansofalaminarmodel.FEMAGSoft©2013ModelingofFZgrowth(cont’d)InductionheatingFEMAGSoft©2013ModelingofFZgrowth(cont’d)InductionHeatinginFZsemi-conductorgrowthFEMAGSoft©2013JsourceJeddyJcurrentdens

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5、essure)openmeltingfront(thinfluidfilm)tangentialstressexertedontothemeltfreesurface:-generallyundesiredresultingshearflow-potentiallyusefuleffecttocontroltheflow.InductionHeatinginFZsemi-conductorgrowthModelingofFZgrowth(cont’d)FEMAGSoft©2013InductionHeatinginFZs

6、emi-conductorgrowthBmagneticinductionm0magneticpermeabilityofvacuumselectricconductivitywangularfrequencySkindepth:dBConductorDissipatedpower:Forcedensity:Heatflux2)Normalstress3)TangentialstressAlternatingmagneticfieldeffects:InductorSusceptorModelingofFZgrowth(co

7、nt’d)DevelopmentofamathematicalmodeloftheelectromagneticfielddistributioninplanarandaxisymmetricconfigurationsHypothesis:lowvalueofthemagneticskindepthFEMAGSoft©2013Modelbasedonusing:-amatchedasymptoticexpansiontechniquetoapproximatetheelectromagneticfieldinsidet

8、heconductors-aFiniteElementnumericalrepresentationoftheelectromagneticfieldoutsidetheconductors.ModelingofFZgrowth(cont’d)Meandissipatedpower:Mea