等离子体浸没离子注入技术在ZnO薄膜p型改性方面的应用研究.pdf

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1、摘要..........................................................................................................................……IAbstract..............................................……‘.............................................................……111第一章绪论.........……”.............

2、...……”..…”.……“....................……”.……“......……”…11.1研究的背景与意义....................................................................................……11.2作者的研究内容和成果............................................................................……3第二章等离子体浸没离子注入实验装置的相关介绍................

3、.....................……52.1等离子体浸没离子注入和常规束线离子注入的比较...............................……52.ZP工I工实验装置...........................................................................................……62.2.1等离子体源..................................................................................

4、.........……72.2.2高压脉冲电源....................................................................................……72.2.3真空系统............................................................................................……82.2.4诊断系统.........................................................

5、.................................……92.3Pll工注入剂量标定.......................................................···.······················……12第三章Zno薄膜的制备技术和表征手段.......................………..........................……13t‘.1、.Qq1JZ。()牡享J兑l的制备技术................................................

6、...............................……131︸J上几1.‘.，..1磁控溅射法.................................................................................····....……13化学气象沉积法...................……，....................................................……13喷雾热解法............................................

7、..........................................……14溶胶凝胶法......................................................................................……14脉冲激光沉积法(PLD)................................................................……14分子束外延法(MBE)................................................

8、....................……巧原子层外延生长法(ALE)....