一种大量程SOI压阻式压力传感器.pdf

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1、第28卷第8期传感技术学报V0l_28No．82015年8月CHINESEJOURNALOFSENSORSANDACTUATORSAug．2015APiezoresistiveSOIPressureSensorforWideMeasurementRangeZHANGRui，LIANGTing，，XIONGJijun一，LIUYutao一，WANGTaolong一．WANGXinxin，(1．KeyLaboratoryofInstrumentationScience＆DynamicMeasurement(North

2、UniversityofChina)，MinistryofEducation，Taiyuan030051，China2．ScienceandTechnologyonElectronicTest＆MeasurementLaboratory，NorthUniversityofChina，Taiyuan030051，China)Abstract：ThispaperfocusesonstructuraldesignforoptimizingsensitivityoftraditionalpiezoresistiveSOl

3、pressuresensortoen—hancemeasurementrangeinhigh-temperatureenvironments．Bymodelingmechanicalproperties，ashallow—bossconfigurationisadopt—edforincreasingsensitivityandmeasurementrange．Keyinfluencefactorsofsensitivityincludingbossthicknessandshapeareana—lyzedand

4、simulated．Dopingconcentration，sizeofsinglepiezoresistor，arrangementofmetalwiresandtheirmaterialareobtainedwhentakingintoaccountdevicehigh—temperatureperformance．Piezoresistorlocationisarrangedonthebasisoftakingfulladvantageofmax—imum(orI—or)regionstomaintains

5、ensitivityandlinearity．Accordingtostressdistributionofthediaphragm，U—shapedpiezoresistorsarefinallyadoptedbyconsideringsensitivitylossduetofabricationdeviationofshallowbossedstructure．Finiteelementanalysis(FEA)resultsshowthattheoptimumdesignenablesthesensorch

6、iptooperateinwiderpressurecondition(within10MPa)withahighsensitivityof86．6mV／(V·MPa)andexcellentnonlinearityislessthan0．1％．Comparedwithothercurrentwide—rangesensors，thestrengthofshallowcentralbossedstructureliesinsensitivityandoverloadcapacity．Keywords：wideme

7、asurementrange；piezoresistiveSO1pressuresensor；hightemperature；finiteelementanalysis(FEA)EEACC：7230doi：10．3969~．issn．1004-1699．2015．O8．005一种大量程SO1压阻式压力传感器张瑞，梁庭，熊继军1,2，刘雨涛，王涛龙，王心心(1．中北大学仪器科学与动态测试教育部重点实验室，太原030051；2．中北大学电子测试技术国防科技重点实验室，太原030051)摘要：对传统的SOI压阻式压力传

8、感器进行了结构优化。目的是提高灵敏度，以满足在高温环境下大量程压力测量的实际需求。通过力学性能模拟，采用浅凸台结构来提高灵敏度和测量范围。分析并模拟了凸台厚度和形状对灵敏度的影响。得到了适合高温工作的掺杂浓度，压敏电阻的尺寸，金属引线的材料和布局。电阻放置在(or广-or)最大的区域以保持灵敏度和线性度。采用U形电阻补偿在浅凸台制作过程中的工艺偏差对灵敏度的影响。有限元分