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1、ISO14644-1（国际标准）空气洁净度等级(N)大于或等于所标粒径的粒子最大浓度限值（个/每立方米空气粒子）类似于传统级别0.1um0.2um0.3um0.5um1.0um5.0umISOClass1102ISOClass210024104ISOClass31,0002371023581级ISOClass410,0002,3701,0203528310级ISOClass5100,00023,70010,2003,52083229100级ISOClass61,000,000237,000102,00035,2008,3202931000级ISOC
2、lass7352,00083,2002,93010000级ISOClass83,520,000832,00029,300100000级ISOClass935,200,0008,320,000293,000各国洁净度等级近似对照表：个/M≥0.5umISOUSUSEECFRANCEGERMANYJAPAN14644-1(1999)209E(1992)209D(1988)cGMP(1989)AFNOR(1981)VDI2083(1990)JAOA(1989)1-------3.52----0210.0-M1-----35.33M1.51--13100-
3、M2-----3534M2.510--241,000-M3-----3,5305M3.5100A+B4,0003510,000-M4-----35,3006M4.51,0001,000-46100,000-M5-----353,0007M5.510,000C400,000571,000,000-M6-----3,530,0008M6.5100,000D4,000,0006810,000,000-M7-----
