AS600DMTG型计算机全自动离子镀膜机技术规格.doc

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1、SpecificationofonesetcomputerautomationionplatingmachinemodelAS600DMTGAS600DMTG型计算机全自动离子镀膜机技术规格April2003Vacuumchamber真空室F800x1000mm2EffectiveCoatingSpace有效镀膜空间F600x600mm2UltimatePressure极限真空度<3.0x10-4PaPumpDownTime(fromatmosphereto4.0x10-3Paemptychamberatroomtemperature)抽气时间（

2、室温空真空室条件下由大气抽至4.0x10-3Pa）<10minCoatingCycle(Tool)镀膜时间（工具镀）~180minTotalElectricPower总电功率(380-400V,50-60Hz)80kVACoolingWaterCirculation冷却水循环3.0吨/小时,2.0kg/cm2,205C3.0吨/小时,2.0kg/cm2,5和30COccupationSpace占据空间5x6x3.5m3Application应用Variouscutting,punchingandmoldingtoolsandhighquality

3、decorativepurposes各种切削、冲模具和高质量的装饰涂层1-Mainbody主体1SET1)-VacuumChamberwithenhancedwatercoolingjacket带增强水冷壳的真空室1set2)-Frontdoorwithcurvedsurfacetoenhanceitsrigidityand2viewportsandextra2MSsourceflanges带二个观察窗和另外2个磁控靶法兰孔的拱形（增强刚性）前开门1set3)-Workpieceturntableonchamberroof顶装工件转架1set10

4、hookswithrevolutionandrotationforsmallandmediumsizeworkpiecewithspaceof130indiameter10个带自公转挂钩用于装挂中小尺寸工件，回转直径为130。4)-Oneviewportandoneinfra-redtemperaturedetectorviewportunderthelargeevacuationtube一个观察窗和一个红外测温窗置于大抽气口下方1set5)-Multi-layerchamberlining(shield)多层真空室热屏蔽板1set6)-Side

5、doorforlargerectangularMSsourcetwin大长方形磁控孪生靶专用侧开门2pcs7)-Evaporationsourceflangeinacolumnwithanearcase一列蒸发源法兰带耳柜3pcs8)-Bottomflangeforlargerectangularionsource大长方形离子源用底法兰2pcs9)-Bottomflangeforcentralelectricheatersetandheatingtubesbythechamberwall中心加热器用底法兰和旁边加热管用法兰1set10)-Flan

6、geonvacuumtubeforliquidN2coolingtrap在真空管道上的液氮冷阱用法兰1pc11)-Chamberchassis真空室底架1set2-Vacuumevacuationsystem真空获得系统1SET1)-Turbomolecularpump3500/400涡轮分子泵（3500/400）1set2)-LeyboldrotaryvanemechanicalpumpforbackingTRIVACD16B用于前级的莱宝直连旋片式机械真空泵1set3)-Leyboldsinglestagerotaryvanemechanic

7、alpumpSOGEVACSV200单级旋片式莱宝机械真空泵1set4)-Rootspump罗茨真空机械泵ZJY-150A[采用同步启动技术（丹普专利）]1set5)-HighvacuumvalveGDQ-J400高真空阀1set6)-AsteppingmotordriventhrottlevalveΦ400步进电机驱动节流阀(丹普专有)1set7)-AcoldtrapΦ400withhighventilation高通导扩散泵冷阱1set8)-Vacuumvalvesandvacuumtubes真空阀和真空管道1set9)-Pneumaticdr

8、ivingsystem气压传动系统1set3-ComplexvacuummeterSKY90[oneionizationgaugeZJ-