溶胶凝胶法制备PMNT薄膜及性能研究

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1、密级公开分类号ＴＱ１７０＿方知料京ＸＩＡＮＴＥＣＨＮＯＬＯＧＩＣＡＬＵＮＩＶＥＲＳＩＴＹ硕士学位论文题目：溶胶凝胶法制备ＰＭＮＴ薄膜及性能研究作者：张德强指导教师：蔡长龙教授申请学位学科：微电子学与固体电子学２０１８年５月２８曰密级公开分类号TQ170XI’ANTECHNOLOGICALUNIVERSITY硕士学位论文题目:溶胶凝胶法制备PMNT薄膜及性能研究作者：张德强指导教师：蔡长龙教授申请学位学科：微电子学与固体电子学2018年5月28日明：这两种元素均可提高

2、PMNT薄膜的电学性能，尤其Pr元素的掺杂，相比于比未掺杂时，介电和铁电性能提高了一倍。La的掺杂在一定程度上更倾向于使得准同型相界的PMNT向赝立方结构偏移。5、采用湿法腐蚀对PMNT薄膜进行图形化；然后，采用剥离技术进行了NiCr合金和Au电极的沉积，完成了热释电器件单元图形化的工艺探究。关键词：铌镁酸铅-钛酸铅；溶胶-凝胶；介电；铁电；热释电；微结构12.495µC·cm-2，andthecoercivefieldis45.6kV/cm.Thirdly,theelectricalpropertiesofdifferen

3、tcomponents(1-x)PMN-xPT(x=0.25,0.36and0.40)werecomparedandanalyzed.Theresultsshowthat0.75PMN-0.25PTand0.6PMN-0.4PTinpscudo-cubicandtetragonalstructurehavelargedielectricconstant,therelativedielectricconstantunder1kHZfrequencyof1534and1800respectively,whencomparethe

4、dielectric-temperaturefoundthatinpscudo-cubicstructureof0.75PMN-0.25PTunder10kHzfrequencycomponentsappearthephenomenonofthediscontinuity.While0.64PMN-0.36PTand0.6PMN-0.4PTshowedexcellentdielectric-temperaturecharacteristicsathighfrequency.Inaddition,theeffectsofthe

5、dopingofLaandPrtworareearthelementsonthepropertiesof0.7PMN-0.3PTwerestudied.TheresultsshowthatbothoftheseelementscanimprovetheelectrochemicalpropertiesofPMNTfilms,especiallythedopingofPrelements,andthedielectricandferroelectricpropertieshavebeendoubledcomparedwitht

6、hatofundoped.Inacertaindegree,thedopingofLaismoreinclinedtomakethePMNTofmorphotropicphaseboundarytobeoffsetbythepseudo-cubicstructure.Finally,thePMNTfilmsweregraphedbywetcorrosion;then,thedepositionofNiCralloyandAuelectrodewascarriedoutbyLift-offtechnique.Theproces

7、sexplorationofthegraphingofpyroelectricunitiscompleted.KeyWords:Leadmagnesiumniobate-leadtitanate;sol-gel;dielectric;ferroelectric;microstructure目录1绪论...................................................................................................................

8、....................11.1铁电材料的发展及应用...................................................................................................11.2热探测器件...