重要[Applied physics letters]Controllable graphene N-doping with ammonia plasma.pdf

重要[Applied physics letters]Controllable graphene N-doping with ammonia plasma.pdf

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1、ControllablegrapheneN-dopingwithammoniaplasmaYung-ChangLin,Chih-YuehLin,andPo-WenChiuCitation:Appl.Phys.Lett.96,133110(2010);doi:10.1063/1.3368697Viewonline:http://dx.doi.org/10.1063/1.3368697ViewTableofContents:http://apl.aip.org/resource/1/APPLAB/v96/i13PublishedbytheAIPPublishingLLC.Additionali

2、nformationonAppl.Phys.Lett.JournalHomepage:http://apl.aip.org/JournalInformation:http://apl.aip.org/about/about_the_journalTopdownloads:http://apl.aip.org/features/most_downloadedInformationforAuthors:http://apl.aip.org/authorsDownloaded05Sep2013to202.120.49.214.Thisarticleiscopyrightedasindicated

3、intheabstract.ReuseofAIPcontentissubjecttothetermsat:http://apl.aip.org/about/rights_and_permissionsAPPLIEDPHYSICSLETTERS96,1331102010ControllablegrapheneN-dopingwithammoniaplasmaaYung-ChangLin,Chih-YuehLin,andPo-WenChiuDepartmentofElectricalEngineering,NationalTsingHuaUniversity,Hsinchu30013,T

4、aiwanReceived6December2009;accepted16February2010;publishedonline1April2010Hereweshowthatgas-phasedopingbymeansofNH3plasmaexposureisahighlyßexibleandmanufacturableprocessforgrapheneelectronics.Thenitrogen-containingradicalscanreadilyformcovalentbondswiththecarbonlatticeandkeepstableinthepostanne

5、alingfordamagerestoration.TheamountofchargetransfercanbeÞnetunedbycontrollingtheexposuretimeandmonitoredbythesystematicshiftintheRamanGmodeandtheGds−Vgcurvesintransportmeasurements.Themaximumdopinglevelcanreach1.51013cm−2.©2010AmericanInstituteofPhysics.doi:10.1063/1.3368697Tremendouspotentialf

6、ortechnologicalapplicationshasusedinthecurrentstudy.Ithasbeenshownthatbilayerthrustgraphene,asingleatomiclayerofhexagonalcarbongraphenegrownontransitionmetalsrecoversthecharacter-network,intooneofthehottestareasofresearchactivity.isticDiracconesofisolatedmonolayergrapheneduetotheThishasbeenfueledb

7、yrecentexperimentalbreakthroughseffectivescreeningoftheinnergraphenelayerfromthe1indiverseapplicationareas,rangingfromgassensors,tometald-statesand,asaresult,bilayergrapheneontransition29structuralreinforcingagen

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