直流辉光放电电离特性的PICMCC模拟

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1、电子科技大学硕士学位论文直流辉光放电电离特性的PIC/MCC模拟姓名：宫文英申请学位级别：硕士专业：等离子体物理指导教师：杨中海20090501摘要布及自洽场电势分布等随时间演化的特性进行了诊断，模拟结果很好的解释了直流辉光放电等离子体的电离特性。关键词：直流辉光放电，粒子模拟，蒙特卡罗，电离IIABSTRACTABSTRACTTechniqueofglowdischargeisextensivelyusedinsurfacemodification，filmfabrication，etchingandSOon．Thecharacteristicsofchargedparticles

2、areattractingconsiderableattentionsintheseapplications．IIlcontrasttotheinvestigationsofthesteady-stateofdirectcurrentglowplasma，thecharacteristicsofionizationprogressindirectcurrentglowdischargeislessstudied．Theresearchontheionizationprocessofdirectcurrentglowdischargeismeaningfulforthemoreaccu

3、ratesimulationaccordswiththerealphysicalevolutionprocessandmoredetailedmicrocosmicandtransientstateresultsCanbeobtained，whichaccordswiththerealphy7sicalevolutionprocessandgivesmoredetailedmicrocosmicandtransientstateresults．AndthewholedischargeregionCanbeincludedinthesimulation，andmorecomprehen

4、sivedescriptionsforthedirectcurrentglowdischargeCanbeobtained．Themajorachievementsarelistedasthefollowing：(1)Particle，fluid，andhybridmodelsarefocusedonthetheoreticalandcomputersimulationofthedirectcurrentglowdischargeanddirectcurrentglowdischargeplasma．Inthispaper,thesethreemodelsarereviewed，su

5、mmarized，andcontrastedrespectively．Thefutureresearchanddevelopmentisviewed．Itisimportanttostudytheionizationofthedirectcurrentglowdischarge．Andtheparticle—in-cellplusMonteCarlocollisionmethodinparticlemodelispreponderantinthesimulationofthedirectcurrentglowdischargeanddirectcurrentglowdischarge

6、plasma．(2)Atheoreticalmodelhasbeenproposedtostudytheionizationcharacteristicsofthedirectcurrentglowdischargeofargon．Theplasmacollectivemotion，collisionsbetweenparticles，theinteractionbetweenthechargedparticlesandtheboundaryaretakenintoaccount．Theelastic，excitation，ionizingelectron—neutralcollis

7、ionsandelastic，chargeexchangeion-neutralcollisionsareincluded．Thecrosssectionsarethefunctionsofparticle’Senergy．Andthesecondaryelectronemissionmodelhasbeendevelopedtosimulatethebehavioroftheionwhichcomestotheboundaryintheprogresso