超精密磨削蓝宝石基片的软磨料砂轮磨削性能

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1、大连理工大学硕士学位论文超精密磨削蓝宝石基片的软磨料砂轮磨削性能姓名：程国良申请学位级别：硕士专业：机械制造及其自动化指导教师：康仁科20081218超精密磨削蓝宝石基片的软磨料砂轮磨削性能J'●●●，’^●■'o'kinndlnRpertormanceotSOnabraSlVegrlnamzWneeJUsedinultra-precisiongrindingsapphiresubstrateAbstractSapphiresinglecrystalhaswonderfulthermalcharacter，electricalproperties，highertransmittance，wea

2、ringqualityandhigherhardness．Therefore，itwidelybeusedinlargescreencolorfuldisplay，speciallighting，trafficsigrlal，opticalcommunicationfieldseta1．It’Salsotheideasubstratematerialforhighperformancesemiconductorchip，atthesametimeitextensivelybeusedinmilitaryfieldasthewindowmaterialforinfraredreceiversan

3、dsensors．Ithasthehighdemandinsurfaceprocessingprecisionandsurfaceintegritynotonlyinmicro-electronicsandphotoelectronfields，butalso嬲thedetectwindowmaterial．TheMohshardnessofsapphimsinglecrystalis9，SOit’Sdifficulttoprocessing．Loosediamondabrasivelappinghavethelowefficiency，abrasivelargeconsumption,hi曲

4、processingcostandcauseseveresurface／subsurfacedamage．ThefinalCMPprocessingalsohavethelowefficiency，andit’Sdifficulttohandlethealkalescencyoracidityslurry．Thepaperproposesthesapphiresubstratesoftabrasivegrindingwheelprocessingmethodaimingattheproblemsinprocessing．Thegrindedsapphiresubstratenotonlyhas

5、thesurfaceprocessingprecisionandhighefficiency，butalsothelowdamagesurface．Accordingtosapphire’Sphysicochemicalcharacteristics，thepaperoptimizedselectthecompositionsofsoftabrasivesharper,designthesoftabrasiveshaperformulasandstructure，researchtheshaperprocessingtechnology，developthetwodifferentmainma

6、teriallappingplate．Studythekilldofabrasives，lappingplatespeed，lappingpressureinfluenceonprocessingquality．Basedonthis，improvethesoftabrasivegrindingwheelformulas，anddesignthestructureofsoftabrasivegrindingwheel，manufacturethetwodifferentmainmaterialcup—typesoftabrasivegrindingwheel，carrythematchexpe

7、rimentsusingthediamondgrindingwheelinsamemesh,studythegrindingperformanceofsoftabrasivegrindingwheel．ThetestindicatethatsapphiresubstrateCanachievesuper-smooth，lowdamageprocessingsurfaceandhi曲material