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1、SEMIE95-1101(Reapproved0307)SPECIFICATIONFORHUMANINTERFACEFORSEMICONDUCTORMANUFACTURINGEQUIPMENTThisstandardwastechnicallyapprovedbytheglobalInformation&ControlCommittee.ThiseditionwasapprovedforpublicationbytheglobalAuditsandReviewsSubcommitteeonNovember21,2006.Itwasavailableatw
2、ww.semi.orginFebruary2007andonCD-ROMinMarch2007.OriginallypublishedFebruary2000;previouslypublishedNovember2001.1Purpose1.1Thisstandardaddressestheareaofprocessingcontentwiththedirectintentionofdevelopingcommonsoftwarestandards,sothatproblemsinvolvingoperatortraining,operationspe
3、cifications,andefficientdevelopmentcanberesolvedmoreeasily.1.2Thisstandardiswrittentobe“tool-neutral”withoutreferenceto,orrelianceon,specificcapabilitiesofplatformsoroperatingsystems.Neitherisitintendedthatchoicesofsoftwaretoolsordetailedimplementationstrategiesbedictated.1.3Note
4、thatallfiguresinthisstandardareschematic,arenotdrawntoscale,andunlessotherwisespecified,arenotintendedtoprovideimplementationdetailsaboutnumberofbuttons,buttonsizes,panelsizes,etc.2Scope2.1Thisstandardspecificationappliestomanufacturingequipmentusedintheproductionofsemiconductors
5、.2.2Thisstandardmaybeapplicabletootherareassuchasthemanufactureofflatpaneldisplays,butspecificapplicationtotheseareasisoutsidethescopeofthisdocument.NOTICE:Thisstandarddoesnotpurporttoaddresssafetyissues,ifany,associatedwithitsuse.Itistheresponsibilityoftheusersofthisstandardtoes
6、tablishappropriatesafetyandhealthpracticesanddeterminetheapplicabilityofregulatoryorotherlimitationspriortouse.3ReferencedStandardsandDocuments3.1None.4Terminology4.1condition—apropertyofadisplayedobjectorvalue(textualornumeric)thatvisuallyindicates,ifapplicable,whetherthecurrent
7、stateofanobjectorthecurrentvalueviolatesthedefinedboundsofnormaloperationalstatesorparameters,whetherthatviolationiscategorizedasaminorexception(acaution)orasevereexception(analarm),andprovidesnovisualindicationifnoexceptionhasoccurred.4.2displayobjects—userinterfaceelementsdispl
8、ayedonthescreen,suchasfunctionselectionb
