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1、 A CH ! ! C SEMATECHandtheSEMATECHlogoareregisteredservicemarksofSEMATECH,Inc.HEPAisaregisteredtrademarkofHEPACorporationMotifisaregisteredtrademarkofOpenSoftwareFoundation,Inc.QUADisaregisteredtrademarkofLamRe
2、searchCorporation.SCALPELisatrademarkofAT&T.TLVisatrademarkoftheAmericanConferenceofGovernmentalIndustrialHygienists.VAXisaregisteredtrademarkofDigitalEquipmentCorporation.WorkStreamisaregisteredtrademarkofConsilium,Inc.ASTMdefinitionshavebeenreprinted,withpermission,fr
3、omtheAnnualBookofASTMStandards,copyrightAmericanSocietyforTestingandMaterials,1916RaceStreet,Phila-delphia,PA,19103±1187.ASMEdefinitionshavebeenreprintedwithpermissionfromtheAmericanSocietyofMe-chanicalEngineers,345East47thStreet,NewYork,NY,10017±2392.EIAdefinitionshave
4、beenreprintedwithpermissionfromtheElectronicIndustriesAssociation,2500WilsonBoulevard,Arlington,VA,22201±2392.IEEEdefinitionshavebeenreprintedfromIEEEStd100±1992IEEEStandardDictionaryofElectricalandElectronicsTerms,copyright1993bytheInstituteofElectricalandElec-tronicsE
5、ngineers,Inc.TheIEEEdisclaimsanyresponsibilityorliabilityresultingfromtheplacementanduseinthispublication.InformationisreprintedwiththepermissionofIEEE.NationalTechnologyRoadmapforSemiconductorsdefinitionsarereprintedwithpermissionfromSemiconductorIndustryAssociation(SI
6、A),4300StevensCreekBoulevard,Suite271,SanJose,CA,95129.SEMIdefinitionsarereprintedbySEMATECHwithpermissionfromSemiconductorEquip-mentandMaterialsInternational.CopyrightSemiconductorEquipmentandMaterialsIn-ternational,805E.MiddlefieldRoad,MountainView,CA,94043.Torequestc
7、opiesofthisdictionary,contact:SEMATECHCustomerService2706MontopolisDriveAustin,TXUSA(512)356-3500Reproductionand/ordistributionofthisdocumentisprohibitedwithoutwrittenpermissionfromorbypriorlegalagreementwithSEMATECH.Ó1989,1991,1992,1995SEMATECH,Inc.SEMATECHOfficialDict
8、ionary,rev.5.0TechnologyTransfer#91010441C-STDSEMATECHAugust31,1995Abstract:Thisdictionarydefinestermsinthesem
