SEMI F28-0997 TEST METHOD FOR MEASURING PARTICLE GENERATION FROM PROCESS PANELS

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1、4SEMIF28-0997N/A©SEMI1997TESTMETHODFORMEASURINGPARTICLEGENERATIONFROMPROCESSPANELS1PurposeActualperformanceunderoperatingconditionsatlowerßowratesorlessaggressiveconditionsmaydif-1.1ThepurposeofthisdocumentistodeÞneafer.Thistestmethoddoesnotaddressparticlegenera-methodfortestingp

2、rocesspanelsintendedforinstalla-tionundervibratingconditions.tioninhigh-puritygasdistributionsystems.Applica-tionofthistestmethodisexpectedtoyieldcomparable3.2Thetestmediumislimitedtonitrogen,argon,ordataamongprocesspanelstestedforthepurposesofcleandryair(CDA).Performancewithothe

3、rgasesqualiÞcationforthisinstallation.maydiffer.1.2Thisdocumentdescribesatestmethoddesignedto3.3Theaccuracyofthedatageneratedbythismethoddrawcomparisonsofparticulategenerationperfor-islimitedtotheaccuracyoftheparticlemeasuringmanceofprocesspanels.Thistestmethodevaluatesinstrument

4、sutilized.thecleanlinessofprocesspanelsinthe"asreceived"3.4Thismethodiswrittenwiththeassumptionthatconditionaswellasundernormaloperatingcondi-theoperatorunderstandstheuseoftheapparatusatations.The"asreceived"testisintendedtoenablethelevelequivalenttosixmonthsofexperience.usertoev

5、aluatethefabrication,cleaning,andpackag-ingtechniquesofthemanufactureroftheprocess3.5Thisdocumentisnotintendedasamethodologypanel.Thetestunderactualoperatingconditionsisformonitoringon-goingparticulateperformanceonceintendedtoallowtheusertoevaluatethemanufactur-aparticularprocess

6、panelhasbeentested.Also,thiser'scomponentselectionaswellasthequalityofthemethoddoesnotincludeextendeddynamicparticlepaneldesign.ThespeciÞcßowratesdescribedinbothcounttesting(particlegenerationafterthousandsoftestmethodsarerepresentativeofrelativelyhighßowcycles).conditionsforatyp

7、icalprocesspanel.3.6Auto-crossoversystemsarenotwithinthescopeofthistestprocedure.2ScopeNOTE:Itshouldbementionedthattestresultsfrom2.1ThistestmethodaddressestotalparticlecountspanelsequippedwithÞnaloutletÞlterscandiffersig-greaterthantheminimumdetectionlimit(MDL)oftheniÞcantlyfrom

8、testresultsfrompanelswithoutÞlters.parti