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1、划痕法综合评定膜基结合力真空科学与技术学报a_删SEJOURNALOFVACUUMSC皿NCEANDTECHNOLOGY第29卷第2期2OO9年3,4月划痕法综合评定膜基结合力瞿全炎,邱万奇曾德长H刘正义(1.华南理工大学材料科学与工程学院,金属材料科学与工程系广州510640;2.广东省特种设备检测院广州510655)MeasurementofTiNFilmSubstrateInterfacialAdhesionbyScratchingQuQuanyan1,2,QiuWanqi,ZengDechang卜,LiuZhengyi(1.觚ofMadMatenk~Sde//o~and
2、Eng/neer/ng,SchoolofMuter/a/sSc/enceand,SouthCh/naofTechno/ogy,Ql嘞u510640,Ch/na;2.C.uangdongInstituteofSpecialEquipmentInspection,Guo2~.olt,510655,Ch/na)AbstractTheTiNfilmsweredepositedbyvacuummulti—arcionplatingonWC—Cosubstrate.Thescratchtracksmadethamicro—scratchtester(MST)werecharacterize
3、d’vithanopticalmicroscopeandscanningelectronmicroscope(SEM).Theadhesionattheinterfaceoft}leTiNfilmsandthesubstratewerethenevaluatedbycalculatingtheaCOUStice—missionandfrictionalforcedataobtainedwiththeMST.andtheopticalimagesandSEMmicmgraphsofthescratches.resultsshowthatneitheracousticemissio
4、nspectranorfrictionforcecurvecanexclusivelydeterminetheadhesionstrength;thecriticalloadandtheinterfacialadhesionCanonlybepreciselyevaluatedbycombiningtheacousticemissionspectra.thefrictionforcecurveandtheScratchtruckmorphologies.I11emeasuredresultwiththeMsTagreeswellwitht}1atobtainedwitl1WS-
5、92scratchtester.KeywordsScratchtest;Adhesionstrength;Evaluation;WC—Co/TiN划痕法综合评定膜基结合力真空科学与技术学报a_删SEJOURNALOFVACUUMSC皿NCEANDTECHNOLOGY第29卷第2期2OO9年3,4月划痕法综合评定膜基结合力瞿全炎,邱万奇曾德长H刘正义(1.华南理工大学材料科学与工程学院,金属材料科学与工程系广州510640;2.广东省特种设备检测院广州510655)MeasurementofTiNFilmSubstrateInterfacialAdhesionbyScratchi
6、ngQuQuanyan1,2,QiuWanqi,ZengDechang卜,LiuZhengyi(1.觚ofMadMatenk~Sde//o~andEng/neer/ng,SchoolofMuter/a/sSc/enceand,SouthCh/naofTechno/ogy,Ql嘞u510640,Ch/na;2.C.uangdongInstituteofSpecialEquipmentInspection,Guo2~.olt,510655,Ch/na)AbstractTheTiNfilmsweredepositedbyvacuummulti—arcionplatingonWC—Co
7、substrate.Thescratchtracksmadethamicro—scratchtester(MST)werecharacterized’vithanopticalmicroscopeandscanningelectronmicroscope(SEM).Theadhesionattheinterfaceoft}leTiNfilmsandthesubstratewerethenevaluatedbycalculatingtheaCOUStice—missionandfriction
