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1、角度测量的光学方法研究熊青松(安徽建筑工业学院数理系,合肥230022)摘 要:角度测量是计量科学的重要组成部分,广泛应用于我们的工业生产和科学研究领域。随着科学技术和生产工艺的飞速发展,在精密加工、航空航天、军事和通讯等许多领域都对角度、特别是小角度的测量提出了越来越高的要求。光电测角法由于具有非接触、高精度和高灵敏度的特点而倍受人们的重视,尤其是随着激光光源的发展和精密传感器的出现,使光电测角的测量精度不断提高,应用也越来越广泛。现阶段由于运用了各种先进的测量手段和测量仪器,使测量的精度和灵敏度达到了很高的水平。但是,传统的小角度测量仪器如激光干涉仪,光电自准直仪等,由于具有体积
2、大,系统复杂,造价昂贵,对测量环境要求高等特点而很难用于工业生产和高精度在线测量。目前,光学三角法在测量物体位移、厚度和三维面形等方面均达到了相当高的精度,有很好的研究价值和实用性。正是基于此,本文开展了把光学三角法用于小角度的在线测量研究。关键词:角度测量;光学方法;光学三角法;面阵CCDIIIResearchonAnglemeasurementwithopticalmethodsXiongqingsong(Departmentofmathematics&physics,AnhuiInstituteofArchitectureandIndustry,Hefei,230022,Chi
3、na)Abstract:Anglemeasurementisoneofthemostimportantpartsofmetrology,whichisusedwidelyinindustrialproductionandthescientificresearchdomain.Withthescienceandtechnologyrapiddevelopment,thehighprecisionofanglemeasurementisrequestedinthepreciseprocessing,theaerospace,themilitaryaffairsandthecommunic
4、ationandsoon,especiallysmallanglemeasurement.Peoplepaymoreattentiontothephotoelectricmethod,whichhasthenon-contact,thehighaccuracyandthehighsensitivitystrongpoint,especiallywiththelaserdevicedevelopmentandtheprecisionsensorappearance,thephotoelectricmethod’smeasuringaccuracyisunceasinglyenhanci
5、ng,andtheapplicationdomainismorewidespreading.Atpresentstagebecauseusedadvancedsurveymethodandmeteringequipment,thesurveyaccuracyandprecisionhasbeenachievedahighlevel.Buttheinstrumentoftraditionalsmallanglemeasurementlikelaserinterferometer,photoelectriccollimatorandsoon,canhardlyheusedasangles
6、ensorinindustrialproductionandhighaccuracyon-linemeasurementbecausetheyarebulky,complicated,expensive,anddemandingstrictworkenvironment.Atpresent,opticaltriangulationinmeasurementofdisplacement,thicknessandthree-dimensionshapeetchadachievedahighprecision,soithashighusabilityandresearchvalue.Bas
7、edonthis,researchonusesopticaltriangulationinthesmallangleon-linesurveywascarriedoutinthisthesis.Keyword:themeasurementofangle;opticalmethods;opticaltriangulation;matrixCCDIII目录目录III一引言1(一)本课题的研究动态1(二)角度测量技术的国内外发展概况1二光学三角法的测量原理研究4