钛合金表面磁控溅射与多弧离子镀tin膜的摩擦学性能比较

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1、------------------------------------------------------------------------------------------------钛合金表面磁控溅射与多弧离子镀TiN膜的摩擦学性能比较奚运涛1，刘道新1，李美英2，张晓化1，谭宏斌1(1.西北工业大学腐蚀与防护研究室，西安710072;2.青岛海晶化工集团有限公司,青岛266042)摘要：分别采用磁控溅射(MS)和多弧离子镀(MAIP)技术在TC4钛合金表面制备了TiN膜层，采用划痕仪、显微硬度计和多冲试验机评价了两种方法制备膜层的膜基结合强度及承受静态和动态载

2、荷的能力。采用球–盘磨损试验机评价了膜层的摩擦学性能，利用扫描电镜（SEM）分析了磨痕形态特征，利用轮廓仪测量了磨损体积。结果表明：磁控溅射和多弧离子镀TiN膜层均能显著提高钛合金表面的硬度和承载能力；磁控溅射TiN膜层致密、光滑，有良好的减摩作用，但由于膜层承载能力低和膜基结合强度较差，摩擦因数随磨损行程呈增大变化趋势；多弧离子镀TiN膜层结合强度高，膜层厚，承载能力强，韧性好，同时硬质TiN膜层表面分布的Ti颗粒起到了润滑作用，因而耐磨性能优于磁控溅射TiN膜层。关键词：磁控溅射；多弧离子镀；TiN膜；摩擦学性能；钛合金中图分类号：TG174.44文献标识码：A文章编

3、号：1007–9289(2007)06–0014–05AComparisonoftheTribologicalPropertiesBetweenMagnetronSputteringandMulti-arcIonPlatingTiNFilmsonTitaniumAlloy——————————————————————————————————————------------------------------------------------------------------------------------------------XIYun-tao1,LIUDao-x

4、in1,LIMei-ying2,ZHANGXiao-hua1,TANHong-bin1(1.CorrosionandProtectionResearchLab,NorthwesternPolytechnicalUniversity,Xian710072,China;2.QingdaoHygainChemicalGroupCo.,Ltd,Qingdao266042,China)Abstract:TheTiNfilmsweredepositedontheTC4titaniumalloysurfaceusingmagnetronsputtering(MS)andmulti-ar

5、cionplating(MAIP)respectively.Theirbondingstrengthandsupportingcapacityunderstaticanddynamicloadconditionswereevaluatedusingscratchinstrument,microhardnesstesterandmultipleimpacttester.Thetribologicalpropertiesofthefilmswereinvestigatedusingaballondiskweartester.Thewearscarswereanalyzedby

6、scanningelectronmicroscope(SEM).Thewearvolumeofspecimenswasmeasuredusingaprofilometer.Theresultsshowedthatthesurfacemicrohardnessandsupportingcapacityoftitaniumalloysubstratecouldbeimprovedbybothmagnetronsputteringandmulti-arcionplatingTiNfilms.ThemagnetronsputteringTiNfilmhadasmoothersur

7、faceandacompactmicrostructure;thereforeithadagoodlubricatingfunction.However,thefrictioncoefficientoftheMSTiNfilmwasincreasedgraduallyduringthewearprocessduetothepoorbondingstrengthandlowsupportingcapacityofthefilm.TheMAIPTiNfilmhadbettertribologicalpropertiesthanth