fecosinativeoxide多层膜和fecobo颗粒膜的高频软磁特性

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1、优秀毕业论文摘要因此残留在晶格间隙或晶界处的B逐渐增多，使薄膜内的残留应力逐渐增大，从而使薄膜材料的软磁性变差。4研究了薄膜厚度对材料软磁性的影响，发现只有在膜厚为～150nm时样品获得好的软磁性能。这可以理解为：在样品太薄时，表面和界面效应的影响，使材料4rcM,降低，矫顽力变大；薄膜太厚时，颗粒尺寸变大以及退磁场效应都会使软磁性变差。5＼，、／研究了氧气流量比R02对软磁性的影响，结果表明：在P=80W条件下，获得好的软磁性的RD2的范围(O．4％～4．1％)比40W下的宽，在实际样品制备工作中有较大的优势。，L／L，L6)典型样品：

2、在P=40W条件下制备的FeCoB—O颗粒膜(R02=1．3％)有很高的电阻率P=3638nQ·cm，在频率厂<2GHz范围内，／a，~146，且铁磁共振频率石=3．0GHz：而在P=80W条件下制备的FeCoB．O颗粒膜(R02=O．8％)具有很高的铁磁共振频率‘=4．74GHz。精品参考文献资料优秀毕业论文AbstractAbstractRecentdevelopsinelectronicdeviceshaveledtoanurgentneedforfurtherminiaturizationandhigherfrequencyope

3、rationofmagneticdevices．Oneoftheimportantpropertiesofmagneticmaterialsrequiredforsuchapplicationsishighpermeabilityathighfrequency,whichislimitedbyeddycurrentlossandferromagneticresonance(FMR)frequency．Toproduceasoftmagneticthinfilmwithexcellent∥-fresponse，thefilmmusthave

4、notonlyhighelectricalresistivity∽)，butalsolargesaturationmagnetization(4zcM5)andappropriatein—planeuniaxialanisotropyfield(风)SOastoeffectivelysuppresseddycurrentlossandtopossesshighferromagneticresonance(FMR)frequency石．Metal—insulatorgranularfilmshavedemonstratedgoodsoftm

5、agneticpropertiesandhighresistivitiesduetotheexchangecouplingbetweengranules，andwereextensivelystudied．However,itisonlyatmetalvolumefractionsapproachingpercolationthresholdthatsoftmagneticpropertiesareobtained，whichleadstothedecreaseofeffectivesaturationmagnetizationinpro

6、portiontotheincreaseofoxidefraction．Recently，anewlyintroduceddiscontinuousmetal／native—oxidemultilayerstructure，whichhasbeenexposedinsitutooxygentoformoxideinterfacelayers，cansignificantlyimprovethesoftmagneticpropertiesandhighfrequencycharacteristics，becausetheoxidelayer

7、sexhibitroomtemperatureferromagnetism．TheexcellentsoftmagneticpropertiesimplythattheFeCoSi／native—oxidemultilayerfilmsarepromisingforapplicationinhighfrequencyrange．Inthisdissertation，wedepositedFeCoSi／native—oxidemultilayerfilmsbyDCmagnetronsputteringandexposuretooxygeni

8、nasequenceonglassandKaptonsubstrates，respectively．SoftmagneticgranularfilmsFeCoB一0systemwasfabri