基于亚像素定位匹配算法的mems面内运动测量

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1、Aself-designed3DdynamicMEMSmeasurementsystemisadoptedintheexperimentofin-planemotionmeasurementofmicrostructuredrivenbythetranslationtable.Theoreticalanalysisshowsthatthemaximumfrequencycanbeachieved500KHzusingstroboscopicmeasurement.Usingthestandardcovariancecorrelationmethodtoverifythepixel

2、location,andquadricsurfacefittingalgorithmtoverifythesub-pixellocation.Experimentalresultsshowthatthesystemcancompletethemeasurementofmicrostructurein-planemotion.Afterthefurthercalculation,therangeofmovementsystemis155.14μm,andthemeasurementaccuracyis48.5nm.Keywords：MEMS;SMVS;SIVS;Synchroniz

3、ationcontrol;Sub-pixellocating目录第一章绪论..................................................................................................................11.1课题背景和意义.......................................................................................11.2MEMS动态测量技术在国内外发展现状及趋势...................

4、................21.3本论文研究工作、结构和创新点...........................................................6第二章MEMS动态测量光学系统的设计与实现.....................................................72.1光学系统主要组成部件的原理...............................................................72.1.1激光频闪调制的原理..............................

5、.......................................72.1.2显微照明系统的原理.....................................................................82.1.3显微视觉系统的原理.....................................................................92.1.4显微干涉系统的原理...................................................................112.

6、2光学系统的硬件设计.............................................................................122.3光学系统的调试技术.............................................................................142.4小结.........................................................................................................15第

7、三章MEMS三维动态测量同步控制系统的设计与实现...................................163.1频闪显微视觉和干涉的时序要求.........................................................163.1.1频闪显微视觉的时序要求...........................................................163.1.2频闪显微干涉的时序要求............