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1、西北工业大学工学硕士学位论文ABSTRACTCd,_.Zn.TecrystalhasbeenprovedtobethemostexcellentmaterialtodetectXrayandgammaraysincethe90agesin20thcentury.ComparedwiththetraditionalNalscintillatorprobe,Cd,一nXTeprobehashigherdetectingeficiencyandpowerresolution,andcanbewidelyusedinfieldssuch
2、assecuritymonitor,industrialflawdetection,medicaldiagnosis,celestialbodyXraytelescopeandsoon.OneofthemostkeytechnologiesofpreparingCd,_=ZnxTedetectoristomakeohmiccontactfilmelectrodeonCd,_xZnXTecrystal'ssurface,andthemaintechnologyusuallyusedisevaporation,butthecohes
3、ionofevaporatedfilmisn'tveryfirm.ForthepurposestomakeCdl_XZnxTedetector,ohmiccontactmaterialsofCd,_XZnXTecrystalareselectedandstructureofelectrodeisdesigned.Theprocessingofconductingfilmpreparedbythemagnetronsputeringisstudied.Themainresultsarelistedasfollow:Theconta
4、ctrelationshipbetweenmetalandCd,_,ZnXTeisanalyzedtheoretically,findingthatthemainfactorsaffectingohmiccontactarepowerfunctionsofmetalandsemiconductor,andsurfacelayerefectivestatesaswell,andmeanwhileillustratingthelawsoffactorsafectingonthecontactresistance.Accordingl
5、y,materialsandconstructionofelectrodefilmaredesigned.UsingJGP560Cmagnetronsputeringequipment,Cu/AgfilmaredepositedonCd,.XZnXTesubstratebyDCmagnetronsputeringinordertogettheinfluencesofthemainexperimentsparameterssuchassputeringpower,gasflow,vacuumairpressure,magnetoe
6、lectricitypowerandsubstratetemperatureondepositionrateoffilm,discoveredthatDCsputeringpoweristhemostkeyfactorinfluencingthedepositionrate.Depositionrateisincreasequicklywithsputeringpower.ThepurityoffilmdepositedbyRFmagnetronsputeringisveryhigh,andthereasonthatimpuri
7、tiesexistinthefilmdepositedbyDCmagnetronsputteringisanalyzed.Thickness,impuritiesandmicroconstructionoffilmhasnotableinfluenceu西北工业大学工学硕士学位论文toresistanceoffilm,especiallytheimpurities.Howsputeringpower,substratetemperatureandgasflowinfluencedthepropertiesofcohesionar
8、estudied.Resultsshowthattheincreaseofsputteringpowerhaspositiveafection.KEYWORDS:Cd,一n.TeOhmiccontactFilmMagnetron西北丁业大学工学硕士学位论文第一章
