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1、ABSTRACTABSTRACTWirebondingisonekeyprocessintheintegratedcircuitdevicesassemble,usually,thebondingwireisgoldenwireinthetraditionalassembleprocess.ThegoldenwireisalmostappliedinalltheadvancedICassembleprocessbyits’betterconductivity,elongationandchemicalstabili
2、ty.However,withthegold-price’sgoingup,theassembleprocessusingthecopperwireasthebondingwiregraduallybecomethefirstchoiceintheindustry,although,thetwofatalweaknesswhicharehigherhardnessandeasyoxidationforcopperwireresultinthebondingprocessintheinstabilitystatus,
3、asaresult,thebondingballiseasilybecomingoxidationinEFOandthefailuremodealsoeasilyoccuratthefirstbondingaspadpeeling,siliconcraterandALsqueezeout;furthermore,mostoldwirebondingequipmentisgoldenwireprocessalthoughmanyequipmentmanufacturercaninstallthecopperwirem
4、achine.So,ifdevelopingthecopperwireprocess,thecurrentwirebondingequipmentmustbeupdated,whichisanotherobstacletoexpandthecopperwireprocess.Inthisthesis,theabove-mentionedtwoissueshasbeenstudiedwhichareputinpracticeaspurpose,theexperimentdataandtheoryanalysisare
5、usedasthejudgment,throughtheupgradeforthecopperwireequipmentandthedeepanalysisforthecopperwireprocessfailuremode,thenovelmaterialsandprocessareexploredandresearchedforthetwoissue.Themainresearchcontentsasfollows:1.Detaileddiscussedthebondingwirematerial’stype,
6、applicablesituation,threetypewirebondingtechnology’sdifferenceandintroducedthemarketstatusforthecopperwire,thecopperwire’scostadvantageandthebondingabilityadvantage.2.Detailedresearchedthetechnicalconditionupgradingthewirebondingequipmentfromgoldenwireprocesst
7、othecopperwireprocess,especialthebondingballanti-oxidationdesign,wireclampercalibrationandEFOsystemupgrade,thenstudiedthewholeupgradeprocedureandtherelateditemespecialthetotalequipmentcalibration.3.Detailedexploredthecriticalfailuremodeandtheformationmechanism
8、aspadpeeling,siliconcraterandAlsqueezeout,theninvestigatedtheAirFreeBall’saffectionII万方数据ABSTRACTfactorandits’influenceonthecopperwirebondingprocess,atlastresearchedfailuremodeaffe
