白碳的制备与其特性分析-(6052)

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1、Abstract万方数据目录目录摘要...................................................IIAbstract................................................II1绪论..................................................11.1引言......................................................11.2白碳的结构和分类..........................................2

2、1.3白碳的研究历史............................................41.4白碳的性质和应用..........................................51.5白碳的制备方法............................................71.5.1物理制备方法................................................71.5.2化学制备方法................................................81.6背景和意义.....

3、...........................................91.7论文研究的主要内容.......................................102RF-PECVD制备白碳薄膜................................112.1催化剂Ti膜的制备........................................112.1.1磁控溅射设备...............................................112.1.2磁控溅射技术简介........................

4、...................112.1.3基底的选择.................................................122.1.4催化剂Ti膜的制备工艺......................................132.2RF-PECVD制备白碳薄膜.....................................142.2.1RF-PECVD技术简介...........................................142.2.2RF-PECVD实验设备........................

5、...................152.2.3白碳薄膜的沉积机理.........................................172.2.4实验材料...................................................192.2.5白碳薄膜的沉积工艺.........................................192.3白碳薄膜的表征和测试............................................................................202.3.1SEM表

6、征....................................................202.3.2XRD表征....................................................20IV万方数据目录2.3.3Raman表征..................................................212.3.4维氏硬度测试...............................................212.3.5电阻率的测试...................................

7、............213白碳薄膜生长参数的研究...............................233.1催化剂的预处理对白碳薄膜生长的影响.......................233.1.1SEM分析....................................................233.1.2XRD分析........................................