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1、SpringerSeriesinMaterialsScience19EditedbyRichardM.Osgood,If.SpringerBerlinHeidelbergNewYorkBarcelonaBudapestHongKongLondonMilanParisSingaporeTokyoSpringerSeriesinMaterialsScienceAdvisors:M.S.Dresselhaus.H.Kamimura·K.A.MullerEditors:U.Gonser·R.M.Osgood,Jr..M.B.Panish.H.SakakiManagingEditor:H.K.V.L
2、otsch26GasSourceMolecularBeamEpitaxyGrowthandPropertiesofPhosphorusContainingIII-VHeterostructuresByM.B.PanishandH.Temkin27PhysicsofNewMaterialsEditor:F.E.Fujita2ndEdition28LaserAblationPrinciplesandApplicationsEditor:J.C.Miller29ElementsofRapidSolidificationFundamentsandApplicationsEditor:M.A.Oto
3、oni30ProcessTechnologyforSemiconductorLasersCrystalGrowthandMicroprocessesByK.IgaandS.Kinoshita31NanostructuresandQuantumEffectsByH.SakakiandH.Noge32III-IVNitrideSemiconductorsandDevicesByH.Morkor;:Volumes1-25arelistedattheendofthebook.SimeonM.MetevVadimP.VeikoLaser-AssistedMicrotechnologySecond,U
4、pdatedEditionWith105Figuresand17Tables,SpringerProfessorDr.SimeonM.MetevProfessorDr.VadimP.VeikoBIASIFMOBremenInstituteofAppliedBeamTechnologyInstituteofFineMechanicsandOpticsKlagenfurterStr.2Sablinskaya14D-28359Bremen.Germany197101St.Petersburg.RussiaSeriesEditors:Prof.Dr.U.GonserM.B.Panish,Ph.D.
5、Fachbereich12.1,Gebaude22/6AT&TBellLaboratoriesWerkstoffwissenschaften600MountainAvenueUniversitatdesSaarlandesMurrayHill,NJ07974-2070,USAD-66041Saarbriicken,GermanyProf.R.M.Osgood,Jr.Prof.H.SakakiMicroelectronicsScienceLaboratoryInstituteofIndustrialScienceDepartmentofElectricalEngineeringUnivers
6、ityofTokyoColumbiaUniversity7-22-1Roppongi,Minato-kuSeeleyW.MuddBuildingTokyo106,JapanNewYork,NY10027,USAManagingEditor:Dr.-Ing.HelmutK.V.LotschSpringer-Verlag,Tiergartenstrasse17D-69121Heidelberg,GermanyISSN0933-033XISBN978-3-642-87273-0ISBN978-3-642-87271-6(eBook)DOI10.1007/978-3-642-87271-6Libr
7、aryofCongressCataloging-in-PublicationDataappliedforDieDeutscheBibliothek-CIP-EinheitsaufnahmeMetev,Simeon:LaserassistedmicrotechnologyISimeonM.Metev;VadimP.Veiko.-2.,updateded.-Berlin;Heidelberg;NewYork;Barcelon
