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1、上海交通大学工学硕士学位论文绪论FabricationtechnologyandcharacteristicofanewtypeMEMSbi-stableelectromagneticrelayABSTRACTMicrorelaysasakindofcomponentsarewidelyusedandplaysanessentialroleinthefieldsofaerospace,computerandcommunication.Communicationrelayisoneofthemainapplications,itsoutputvalueaccountsforaboutaq
2、uarteroftheentirerelayindustry,andithasmoretechnicalcontentandhigheraddedvalueofrelayproducts.Abi-stableelectromagneticactuatorusedinmicrocommunicationrelayisstudied.Itiscomposedofaplanarcoil,anickelelasticplatform,andasiliconspacer.ItusesdoublelayersCucoilsandmagnetizedpermalloycoretoincreaseth
3、edrivingforce,usespolymideforisolation,andrealizesthebi-stablemechanismsbypermanentmagnet.Themiddleofthecoilintheplaneandaroundapermalloyplating,sothatdrivesfilmcanformbetweenflatcoilsandmagneticsystems.Inthispaper,accordingtothestructuralparametersofthecomponentsidentifiedbythetheoreticalanalys
4、is,weusemultiplemasklithographyandplatingprocesstoproducedouble-layercoppercoilviaapolyimideinsulatinglayertechnology,andusetheglasssubstrateintheproductionofflexibleplatform.ThroughspinningSU-8resist,nickelflexibleplatformandgasketareachieved,whichprovesthepossibilityoftheintegrationprocess,and
5、makeasolidfoundationforthenextsteptoachievetheoverallintegration.Inthispaper,wealsocompletedtheoverallintegrationprocessofsprings,gaskets,andcoils,achievedtheoverallintegratedprogramfortheoverallintegratedmanufacturingofnextgenerationofmicro-relay.Thispaperhasdoneaseriesoftestsabouttheperformanc
6、eofthemicroelectromagneticrelayaftertheprocesswasimplemented.Thetestoftheelasticityofthespringwascarriedoutbythemeasurementoftherelationshipbetweenmagneticforceanddisplacementcurvetofitthespringconstant;bulittestplatform,measuredtheoutputcharacteristicsofthemicro-magneticdrivebymicroscopesandoth
7、erequipment,testtheperformanceoftheplaneMicroelectromagneticrelaycoil;Havingatestofbi-stablecommissioning,foundtheoperatingpointofthebi-stableMEMSmicroelectromagneticrelaybyexperiment,andverifiedthefeasibilityofthisbi-stable
