用于无掩膜刻蚀的微放电器阵列的设计加工及表征

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1、摘要ABSTRA(了ABSTRACTIntraditionalmicrofabricationmethod，maskiSutilizedtomicropattemprocess．Thisprocesscostslotsoftimeandmoney．Inordertorealizemasklessetchingprocess，wehadproposedamicroplasmaetchingmethodbasedonscanningprobe，thatisintegratingthemicrodischargedeviceo

2、nthecantileverprobetorealizehighaccuracy．Butthecantileverstructureiscomplexandsusceptibletodamageintheexperiment．Therefore，ourresearchgroupproposesanon-cantileverstructureformasklessetchingSOcalledtiparraystructure．Comparedwiththecantileverprobestructure，micropla

3、smatiparraysisstrongerandCanachievehJ【ghefficiencyofetchingprocess．Itcanbeusedinhighprecision，largeareaoftheetchingprocess．Thispapermainlystudiesthecorepartofthemasklessetchingmethod⋯microplasmatiparray,includingitsstructuredesignandperformance．Instructuraldesign

4、part，weoptimizedthespacingbetweenmicrocavityunitsaccordingtotheheatcouplingeffect．UsingComsolMultiphysicstosimulatethethermaleffects．Weoptimizedthethermaleffectonthedevicetoaminimum．Onthefabricationofthedevice，thispaperintroducesthefabricationprocessofthetiparray

5、microdischargedeviceandoptimizespartoftheprocessparameters．Siliconoxidefilmprocessisoptimizedtomaketheproceduremoresimpleandclear．ForthesakeofusiIlgfortiparraymasklessetching，thispapermakessometestfordetailedcharacterizationofthedischargeperformance．Severalfactor

6、sthatmightinfluencethedischargeperformanceweretestedandcompared．Thesefactorsincludedifferentballastresistance，thenumberof邱arrays，thesizeofthemicrocavity,gaspressureandgastype．Optimizethevariousparametersintheelectricalmeasurememtoachievestabledischargeperformance

7、andalsomakethemasklessetchingprocessmoreefficient．Thisworkmaylayagoodfoundationforthemasklessetchingprocessbasedonmicroplasmatiparray．KeyWords：microplasma,microdischargearray,tiparray,masklessetching，V-1characteristicABsTRAcriv目录第一章绪论⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯．．11．1微小等

8、离子体放电器概述⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯11．1．1低温等离子体⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯11．1．2微等离子体放电器⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯11．2微等离子体放电器的相关应用⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯51．2．1微等离子体射流在医学方面的应用⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯61