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1、AbstractTheResearchofDrivingControlTechnologyBasedonElectrothermalMEMSMicromirrorTheResearchofDrivingControlTechnologyBasedonElectrothermalMEMSMicromirrorAbstractMicro-electromechanicalsystems(MEMS)withthecharacteristicsofhighintegration,smallsize,lowpowerconsumption,lowpricea
2、ndstableperformancearebeinggraduallyreplacetraditionalmechanicalstructureandcircuitelectroniccomponents.Themainapplicationareasrelatedtoinformationandcommunications,automation,aerospace,biochemistry,medicalequipment,consumerelectronicsandmilitaryproducts.Thispaperfirstintroduc
3、esthetheoryandapplicationsofelectrothermalMEMSmicromirrorbasedonreversalseriesbimorphandfoldeddual-S-shapedstructure.Itdescribesthedrivingprincipleindetailandanalyzestheinternalrelationshipbetweentheactuatordeformationandmirrordeflection.Thendiscussthemethodofmathematicalmodel
4、ingandestablishamulti-DOFmicromirrorstaticmodelbyintroducingthermalconductivityandspringrigidmodelwhichillustratesthedeformationrelationsbetweenthethermalconductivityandtheinteractionamongmultipleactuators.Afterwardsthedynamicmodelisdeducedbyanalyzingtheelectricandmechanicalch
5、aracteristicsandcombiningthetwotransferfunctions.Atlast,thismodelwasvalidatedbyexperiments.Inordertoreducetheactuatordeviationofthestructureandcharacteristicsbyfabricationprocess,thispaperproposesadatamodelbasedcontrolmethodtocompensatethedeviationbydrivingthemirrorwithsimulat
6、ionsignal.Tosuppressthesystemresidualvibrationandreducethesettlingtime,inopticalswitchandVOA,theresidualvibrationissuppressedwithinputshapingmethodsinthispaper.Finally,thecontrolmethodofOCTscanimagingisresearchedandweproposeacontrolmethodbasedonthestatespacealgorithmtoimprovet
7、hemirrorperformanceandthequalityofOCTimaging.Basedontheabovetheoreticalanalysisandcontrolmethodsresearch,thispaperintroducestheexperimentalresultsfordimensionalelectrothermalmicromirrorinrasterscanning,opticalswitches,VOAandtheOCTimaging.Theaccuracyandvalidityofthemodelandthec
8、ontrolmethodisverifiedinit.ThestudyresultsforelectrothermalME
