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1、哈尔滨工业大学工学硕士学位论文AbstractInertialconfinementfusion(ICF)canproducehigh-qualityandlow-costenergyandhasbecomeahotresearchtopicnowadays.LiF(LithiumFluoride)crystaliswidelyusedasopticalwindowinICFrelatedexperimentsforitsexcellenttransmissivityandwidewavebandfortransmission.Thest
2、air-shapefusiontargetisantypicalexample,itcanhardlybemanufacturedbyothermanufacturemethodsforitsstrictdemandsfordimentionalaccuracyandsurfacequality,whilemicromillinghasitsdecidedadvantage.However,LiFisakindofsoftbrittlecrystalandductilemodecuttingposesachallengetothesele
3、ctionofmicromillgeometriesandprocessingparameters.Asaresult,it’sofgreatimportancetoimplytheresearchofmicromillsdesignandprocessparametersoptimizationwhenLiFcrystalismicromilled.InicialresearchofthisprojecthasshowedthatextremelyseriousdiffusivewearexisedbetweenWCbasedmicro
4、millsandLiFcrystal.Thewearmechanismswerestudied.ResultsshowedthatWCfromthetoolbasementdiffuseddramaticallytoLiFcrystalandreactedwithittoproduceLi2C2andgasWF,whichwasthemainreasonfordiffusivewear.PCDwasultimatelyselectedasthetoolmaterialformillingLiFcrystalanditschemicalin
5、ertnesswasexperimentalverified.Twotypesofmicroendmillsweredesigned.TheirtoolgeometrieswereoptimizedbyFiniteelementmethod(FEM).Afteroptimization,tooltypeⅠhadtheradialrakeangle,radialclearanceangle,axialrakeangleandaxialclearanceangleof-35°,9°,-25°and20°respectively,andtool
6、typeⅡhadtheradialrakeangle,radialclearanceangle,axialrakeangleandaxialclearanceangleof-60°,12°,-55°and20°respectively.SimulationresultsshowedthatthecuttingperformanceoftooltypeⅠwasnotsogoodastheperformanceoftooltypeⅡ.TheprocessparameterswereoptimizedbybothFEMandsingle-fac
7、torexperimentswithtooltypeⅡ.Resultsshowedthat,asthefeedpertoothandspindlespeedincreased,thequalityofslotsurfacebecamebetterthenworse.Thebestfeedpertoothwas665nm/zandthebestspindlespeedwas65000r/min.Asthedepthofcutincreased,theslotsurfacebecameworseanditwasbettertokeepthed
8、epthofcut-II-万方数据哈尔滨工业大学工学硕士学位论文below2μm.TheorthogonalexperimentsweredonewiththetooltypeⅠ,toolty
