压电陶瓷驱动的微纳定位平台系统研究

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1、万方数据东北大学硕士学位论文Abs订actDesignandInvestigationofMicro--positioningPiezo·-stageSystemsAbstractMicro··nanopositioningtechnologyisakeytechnologyformodemhigh-·techmodemindustry．Inprecisionmanufacturing，ultra—precisionmeasurementandmicro—manipulationhavebeenwidelyusedinmanyfields．Inrecentyears，withthedeve

2、lopmentofmodemscience，technologyandindustry,micro—nanopositioningtechnologyisrequiredtobelargestroke，highprecisionandsmallsize．What’Smore，positioningaccuracyandresolutionhaverequiredtoachievethenanoscale，Micro—nanopositioningtechnologylevelsreflectacountry’Stechnologicaldevelopmentandoverallstreng

3、th．Developmicro—narloconductedpositioningtechnologyrelatedresearch．TopromotetherapiddevelopmentofChina’Sadvancedmanufacturing，ultra—precisionmachiningandmeasurement，defenseindustryandotherhigh—techindustryhasasignificantandfar-reachingsignificancePaperisonthebasisofreviewingsystemsonmicro—nanoposi

4、tioningstageresearchandapplicationstatus．Theoreticalanalysisandsimulationstudiesaretostartatwo—dimensionalaspectsofthefocusonmicro·nanopositioningstagedesignandanalysis，systemconstruction，etc．Firstdeterminethetwo--dimensionalmicro-．nanopositioningplatformtodrivethepiezoelectricceramic，flexiblehing

5、efortheimplementingagency,theuseoftheoveralldesigncapacitivedisplacementsensorandPIDcontr01．UsingSolidworks3Dmodelingplatformonmicro—nanopositioning．whichareanalyzedandcalculatedfromthepositioningplatformstiffness，displacementandnaturalfrequencyfromtheoutputthekeyparametersDeterminethedimensionsof

6、themicro—nanopositioningstageonthisbasis，andfiniteelementsimulationstaticsThenanalyzestheprincipleofpiezoelectricceramic，forcapacitancecharacteristicsofpiezoelectricactuators，hysteresis，creepproperties，nonlinearandtemperaturecharacteristicsareanalyzedtheoretically．Amathematicalmodelofpiezoelectric

7、actuatorsisbuilt，determinethepiezoelectricactuatortransferfunction，usePIDcontrolmethodtocontrolpiezoelectricactuators，thenthesimulationcurveisobtained，demonstratingtheeffectivenessofthecontrolV。万方数据东北大学硕士学位论文Abs仃