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1、PROGRESSINPHOTOVOLTAICS:RESEARCHANDAPPLICATIONSProg.Photovolt:Res.Appl.2007;15:563–573Publishedonline27March2007inWileyInterScience(www.interscience.wiley.com)DOI:10.1002/pip.760ResearchMulti-CrystallineSiSolarCellswithVeryFastDeposited(180nm/min)PassivatingH
2、ot-WireCVDSiliconNitrideasAntireflectionCoatingV.Verlaan1*,y,C.H.M.vanderWerf1,Z.S.Houweling1,I.G.Romijn2,A.W.Weeber2,311H.F.W.Dekkers,H.D.GoldbachandR.E.I.Schropp1UtrechtUniversity,FacultyofScience,DepartmentofPhysicsandAstronomy,SID-PhysicsofDevices,P.O.Box8
3、0000,3508TAUtrecht,TheNetherlands2ECNSolarEnergy,P.O.Box1,NL1755ZGPetten,TheNetherlands3IMECvzw,Kapeldreef75,B-3001Leuven,BelgiumHot-wirechemicalvapordeposition(HWCVD)isapromisingtechniqueforveryfastdepositionofhighqualitythinfilms.Wedevelopedprocessingconditi
4、onsfordevice-qualitysiliconnitride(a-SiNx:H)anti-reflectioncoating(ARC)athighdepositionratesof3nm/s.TheHWCVDSiNxlayersweredepositedonmulticrystallinesilicon(mc-Si)solarcellsprovidedbyIMECandECNSolarEnergy.ReferencecellswereprovidedwithoptimizedparallelplatePEC
5、VDSiNxandmicrowavePECVDSiNxrespectively.TheapplicationofHWCVDSiNxonIMECmc-Sisolarcellsledtoeffectivepassivation,evidencedbyaVocof606mVandconsistentIQEcurves.Forfurtheroptimization,seriesweremadewithHWSiNx(withdifferentx)onmc-SisolarcellsfromECNSolarEnergy.The
6、bestcellefficiencieswereobtainedforsamples3withaN/Siratioof12andahighmassdensityof>29g/cm.Thebestsolarcellsreachedanefficiencyof157%,whichissimilartothebestreferencecell,madefromneighboringwafers,withmicrowavePECVDSiNx.TheIQEmeasurementsandhighVocvaluesforth
7、esecellswithHWSiNxdemonstrategoodbulkpassivation.PC1Dsimulationsconfirmtheexcellentbulk-andsurface-passivationforHWSiNxcoatings.InterestingisthesignificantlyhigherblueresponseforthecellswithHWCVDSiNxwhencomparedtothePECVDSiNxreferencecells.Thisdifferenceinbluer
8、esponseiscausedbylowerlightabsorptionoftheHWCVDlayers(comparedtomicrowaveCVD;ECN)andbettersurfacepassivation(comparedtoparallelplatePECVD;IMEC).TheapplicationofHWSiNxasapassivatingantirefl
