提高相位测量轮廓术测量精度应用技术研究

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1、四川大学硕士学位论文提高相位测量轮廓术测量精度应用技术研究姓名：陈永权申请学位级别：硕士专业：光学指导教师：曹益平20060510四J"大学硕士学位论文摘要AppliedtechniquestudyonimprovingmeasurementprecisionofphasemeasuringprofilometryAbstractPhasemeasuringprofilometryisthetechniqueofthemeasuring3-Dprofileusingopticalmethodwithstructuredillumination

2、,whichisfast-speed,non-contactandhi【gh—precision．Avarietyofapplicationsof3一Dshapemeasurementincludecontrolforintelligentrobots，obstacledetectionforvehicleguidance，dimensionmeasurementfordiedevelopment,stampingpanelgeometrychecking,andaeeBratestressandvibrationmeasurement．Ho

3、wever,theCCDnon-linear,theintensityofprojectingfringesnoI卜sinusoidalanderror-transferringwhenthewrappedphaseisunwrappingandshadowandfringe-discontinuinghaveagreataffectonthemeasuringprecisionofphasemeasuringprofilometry．Thisdissertationfocusesonimprovingmeasurememprecisiono

4、fphasemeasuringpmfilometry．ThemainresultsobtainedCallbesulnmarizedasfollows：I．Profilometryforphasemeasurementwithnon-integraltimestwin-frequencygratingispmposed。loweringtheeTrOl'Stransferringduringphase—unwrapping．Thesimulatingexperimentcomparedwithintegraltimestwin-fi'eque

5、ncygratingshowsthatthemeasuringprecisionisimpmved．2．Thesignmosaicsmethodinphasemeasuringprofilometryisproposed．BymeasuringthemeasIlredobjecttwotimesinPMPwhenthemeasuredobjectisrotatedinthered．neeplaneat0andl80degree，andfusingthetwomeasuingresultsthroughsomeofplanedsigns．The

6、3-Dprofileofthemeasuredobjectwasreconstructedaecttratelyfromthemeasuredcredibleheightinformationwit}Iasimplemeasummentsystem．3．Thetemporalphaseunwrappingmethodisdiscussed．Intheleaset20mmonmultipleregionwecarriedoutthetemporalphaseunwrappingbycomputersimulationandexperiment．

7、Keywords：phasemeasuringprofilometry,phaseshifting,non-integraltimestwin—frequencygrating，signmosaics，temporalphaseunwrapping．四川I大学硕士学位论文一．绪论第一章绪论随着计算机技术和通讯技术的迅速发展，光学三维传感技术以其非接触、高速度、高精度、高自动化等优点被广泛地应用于机器视觉、自动加工、工业检测、质量控制、实物仿型、生物医学、逆向工程“3等各个领域，在现实生活中起着十分重要的作用。光学三维传感技术就是利用光学方法来

8、获取物体表面各点空间高度信息的方法和技术，它已经成为人们认识世界的一种重要手段蚴．通常获取物体表面三维信息的方法有两大类：被动三维传感和主动三维传感。1．1被动光学