动态干涉仪干涉图位置配准及移相误差校正_郑东晖

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1、光学学报第36卷第2期Vol.36,No.22016年2月ACTAOPTICASINICAFebruary,2016动态干涉仪干涉图位置配准及移相误差校正111112郑东晖陈磊李金鹏朱文华李建欣韩志刚1南京理工大学电光学院,江苏南京2100942南京理工大学先进发射协同创新中心,江苏南京210094摘要为抑制动态干涉仪系统中存在的干涉图空间位置匹配误差以及移相误差，采用相位相关算法和载频交叠重构干涉术，前者以光斑边缘为匹配特征，通过配准测试光斑，实现对4幅移相干涉图在空间位置上的像素级配准；后者按列交叠重构4幅载频移相干涉图，实现相位谱与误差谱在傅里叶频谱中相分离，滤取相位谱

2、即可抑制移相误差对测量结果的影响。实验结果显示，两种方法均可以有效抑制干涉图的位置配准误差以及移相量误差，其结果与干涉仪结果相吻合，均方根值和峰谷值分别相差0.0057λ和0.0235λ。相位相关算法不受光强畸变等因素的影响，而载频交叠重构干涉术可以同时抑制由移相器件造成的两倍频相位误差和由光强畸变引入的一倍频相位误差。关键词物理光学;动态干涉;相位相关;像素配准;线性载频;移相误差中图分类号O436文献标识码Adoi:10.3788/AOS201636.0226002PositionRegistrationforInterferogramsandPhase-Shifting

3、ErrorCalibrationinDynamicInterferometer111112ZhengDonghuiChenLeiLiJinpengZhuWenhuaLiJianxinHanZhigang1SchoolofElectronicandOpticalEngineering,NanjingUniversityofScienceandTechnology,Nanjing,Jiangsu210094,China2AdvancedLaunchCorporativeInnovationCenter,NanjingUniversityofScienceandTechnology

4、,Nanjing,Jiangsu210094,ChinaAbstractTosuppressthespatialmismatchingandthephase-shifterrorindynamicinterferometer,thephasecorrelationalgorithmandcarriersqueezinginterferometryareusedrespectively.Theformertakestheedgeoftestbeamspotasthematchcharacteristicstoachievethematchingprecisionwithpixe

5、llevelof4phase-shiftinterferogramsinspacebyregistratingthetestspot.ThelatterachievesseparatingthephaselobeandtheerrorlobeinFourierspectrumthroughtherearrangingof4carrierphase-shiftinterferograms,thereforethephaseerrorcanbesuppressedbyextractingthephaselobe.Theexperimentalresultshowsthatthem

6、ismatchingerrorandthephase-shifterroraresuppressedwellbythetwotechniques,andthecorrectedresultaccordswiththeinterferometer,wherethedifferencesbetweentheirroot-mean-squarevalueandpeak-to-valleyvalueare0.0057λand0.0235λrespectively.Thephasecorrelationalgorithmisnotaffectedbyfactorssuchasinten

7、sitydistortion,andthecarriersqueezinginterferometrycanalsosuppressthephaseerrorwhosespatialfrequencyistwicethefringescausedbyphase-shiftingdevicesandphaseerrorwiththesamespatialfrequencyasthefringescausedbytheintensitydistortionerror.Keywordsphysicalopti