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ID:36809094
大小:4.09 MB
页数:71页
时间:2019-05-15
《钨氧化物(WOx)薄膜电致变色性能的研究》由会员上传分享,免费在线阅读,更多相关内容在学术论文-天天文库。
1、摘要摘要本论文选用柔性聚对苯二甲酸乙二醇酯(PET)为衬底材料,利用射频(I江)磁控溅射技术,低温制备了WOx电致变色薄膜。系统研究了工艺参数(包括膜厚、溅射气压、功率和氧分量)对WOx薄膜电致变色性能的影响。利用X射线衍射(XRO)、扫描电子显微镜(SEM)、X射线光电子能谱(xps)、紫外分光光度计、电化学系统等测试手段,分析了溅射所得薄膜的微观结构、表面形貌、成分、透射光谱以及薄膜变色响应时间等。通过对各种工艺参数条件下制备的各系列薄膜样品着色/退色态可见光范围内透射光谱以及薄膜着色/退色响应时间快慢的比较,寻求
2、到薄膜呈现最佳电致变色性能时所对应的制备参数:WOI)【/ITO/PET薄膜在氧分量、溅射气压、功率、膜厚分别为0%/0.9P舶0W/300rim条件下有较好的电致变色性能,薄膜着色/退色态的透射率差值为26%左右,在±1.2V的变色电压下响应速率较快,薄膜着/退色可在9~lOs内完成。在实验基础上探讨了WO)【/ITO/PET薄膜的电致变色机理,XPS分析表明薄膜中钨离子的价态及氧离子的化合环境及含量与电致变色机理密切相关。利用最佳电致变色性能的薄膜封装出柔性衬底准固态电致变色器件,对PE研TO/WOx/LiCl04
3、/ITO/PET准固态器件的电致变色性能做了初步研究,在750rim波长,器件着色态与退色态透射率差值近22%,表明该器件有良好的电致变色性能。关键词:氧化钨,电致变色,射频磁控溅射,非晶态ABSTRACTTungstenoxidethinfilmsweredepositedontosoftpolyethyleneterephthalate口EDsubstratesbyradio-frequencymagnetronsputteringatroomtemperature.Theeffectsofprocessparam
4、eters(includingthickness,sputteringpressure,power,andoxygenpartialpressure)ontheelectrochromiepropertiesoftungstenoxidefilmsweresystematicallyinvestigated.Themicrostructure,surfacemorphology,component,transmission,andresponsetimeoftheWOxfilmswereanalyzedbyX-rayd
5、iffraction(XRD),SEM,XPS,UV-spectrophotometerandelectrochemistrysystem,respectively.Theprocessparametersofthefilmswiththeoptimalperformancewereobtainedbythecontrastofthetransmissionspectrumandtheresponsetimeofthefilmspreparedunderallprocessparameters.Theaveragetr
6、ansmittanceofthetungstenoxidefilmswiththeoptimalprocess(0%/0.9Pa/60W/300nm)Was26%approximatelyinthevisiblelightrange.Undertheappliedvoltageof±1.2Vthedurationofcoloredprocessandbleachedprocessofthetungstenfilmwasaround9sto10s,whichindicatedthatthesamplehasrapidre
7、sponsevelocities.Theelectrochrromicmechanismoftungstenoxidethinfilmswerediscussedaccordingtotheeffectsofprocessparametersontheelectrochrromicproperties.TheresultsofⅫSindicatedt11atthechangeofchemicalstateofWandthebindingenergyofOinthetwoECstateshavecloselyrelati
8、onshipwithelectrochrromicmechanism.Basedonthebestelectrochromicperformances,theflexiblesolid-stateelectrochrromicdeviceswerefabricated.西eelectrochromicpropertiesofPET
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