MEMS微推进器的设计制造与测试

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1、分类号V437学号14010073ＵＤＣ密级公开工学硕士学位论文MEMS微推进器的设计制造与测试硕士生姓名李星辰学科专业航空宇航科学与技术研究方向飞行器总体设计与系统仿真指导教师黄奕勇国防科学技术大学研究生院二〇一六年十月Thedesign，fabricationandtestofmicrothrusterbasedonMEMStechnologyCandidate：LiXingchenAdvisor：HuangYiyongAdissertationSubmittedinpartialfulfillmentoftherequirementsforthedeg

2、reeofMasterofEngineeringinAeronauticalandAstronauticalScienceandTechnologyGraduateSchoolofNationalUniversityofDefenseTechnologyChangsha，Hunan，P.R.ChinaOctober，2016国防科学技术大学研究生院硕士学位论文目录表目录................................................................................................

3、..........I图目录..........................................................................................................I摘要.................................................................................................................iABSTRACT.....................................

4、...................................................................iii绪论........................................................................................................1课题研究背景及意义.......................................................................................1国内外研究现状.

5、..............................................................................................21.2.1微型化学微推进器................................................................................21.2.2微型电推进器..................................................................................

6、......41.2.3微型冷气推进器....................................................................................5论文研究工作...................................................................................................6推进器建模及参数估算..............................................................

7、.............8基于密度比冲的冷气推进剂比较与选择.......................................................8基于理想等熵流动假设的微推进器参数估计...............................................9多物理场耦合模型建立.................................................................................122.3.1流体力学场.........................

8、..........................