70ALION01799A-肖特基流程图.B

《70ALION01799A-肖特基流程图.B》由会员上传分享，免费在线阅读，更多相关内容在教育资源-天天文库。

1、QualitySystemProcedureTitle:SchottkyFlowChartPage8of8DOCUMENTNUMBER:70ALION01799ARev.BSpec#FlowChartLaserscribe1.4YesNoNoYesALotstart1.1VR>65V?TEOSdeposition1.3Thermaloxidation1.2Basephoto2.1Oxideetch2.2Route1?Photoresistremoval(Piranha)2..3IonImplant1.5yesNoThermaloxide?Photoresistremo

2、val(Piranha)2.3Baseoxidation1.61.1.-12GLION01679A1.2.-12GLION01738A12GLION01543A1.3.-12GLION01602A1.4.-12GLION01723A12GLION01581A2.1.-12GLION01692A12GLION01620A12MLION01976A12GLION01595A12GLION01561A2.212GLION01574A2.3.-12GLION01598A12GLION01577A1.5.-12GLION01576A1.6.-12GLION01776A12GLI

3、ON01586A12GLION01639ARoute1Route2Original:2003-10-30Organization：Li-onArea:SchottkyfabLi-onSchottkyFlowChart:ELECTRONICVERSIONSAREUNCONTROLLEDEXCEPTWHENACCESSEDDIRECTLYFROMTHEDOCUMENTREPOSITORY.PRINTEDVERSIONSAREUNCONTROLLEDEXCEPTWHENSTAMPED“CONTROLLEDCOPY”INRED.QualitySystemProcedureTi

4、tle:SchottkyFlowChartPage8of8DOCUMENTNUMBER:70ALION01799ARev.BSpec#FlowChartMetalphoto2.7AlEvaporation3.3TopMetalsEvaporationTiNiAg3.2.2.2Topmetalsdep.TiW/NiV3.2.2.3TopMetalsdep.TiW/NiV/Au3.2.2.1Silicideetch2.6Silicideformation1.7MetalbarrierCr/TiW/NiV/Au3.1.2.2Bcontactphoto2.4Ayes2.4.-

5、12GLION01692A12GLION01620A12GLION01643A12GLION01595A12GLION01561A2.5.-12GLION01574A12GLION01577A3.1.2.112GLION01615A12GLION01618A12GLION01923A3.1.2.2-12GLION01615A12GLION01618A1.7.-12GLION01566A2.6.-12GLION01564A3.2.2.1.-12GLION01615A12GLION01618A3.2.2.2.-12GLION01665A3.2.2.3.-12GLION01

6、615A12GLION01618A3.3.-12GLION01665A12GLION01567A2.7.-12GLION01692A12GLION01620A12GLION01595A12GLION01561AOxideetch2.52.5NoNi/NiPt1/NiPt2/NiPt3/NiPt4Barrier?Metalbarrier3.1.2.1ELECTRONICVERSIONSAREUNCONTROLLEDEXCEPTWHENACCESSEDDIRECTLYFROMTHEDOCUMENTREPOSITORY.PRINTEDVERSIONSAREUNCONTROL

7、LEDEXCEPTWHENSTAMPED“CONTROLLEDCOPY”INRED.QualitySystemProcedureTitle:SchottkyFlowChartPage8of8DOCUMENTNUMBER:70ALION01799ARev.BSpec#FlowChartBOhmicetchforwardandreverse2.9Ohmicetch2.8NeedPMA?Postmetalannealing1.8Stressrelief3.5BackmetalevaporationCr/Ni/Au3.6.1Backmetalsevapora