超声扫描仪原理

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1、HSJangScanningAcousticMicroscope(SAM)ScanningAcousticMicroscope(SAM)超超声声波波扫扫描描显显微微镜镜H.S.Jang1HSJangWhatisUltrasonics?WhatisUltrasonics?什什么么是超是超声声波波•Soundwaveswhichhaveafrequencyover20kHz.16Hz-20,000Hz频率超过20Khz的的声的声波(Audiblefrequency:16Hz-20kHz)(人耳能听听到的听到的声音频率为:16Hz-20kHz)•Thesoundwaveswhichcannotbeh

2、eardbythehumanear.超声波是人耳听听不到的听不到的2HSJangTypesofUltrasonicWavesTypesofUltrasonicWaves超超声声波的波形波的波形1.ShearWave(横波)1)Thevibrationdirectionandpropagationdirectionareperpendicular.振幅方向和传播方向是垂直的2)Transmissioninliquidorairisimpossible.Vibration在液体体和空体和空气中无法传播Propagation3HSJangTypesofUltrasonicWavesTypesofUl

3、trasonicWaves超超声声波的波形波的波形2.LongitudeWave(纵波)1)Thevibrationdirectionandpropagationdirectionaresame.振幅方向和传播方向是一致的2)Transmissioninliquidispossible.可以在液体体中体中传播VibrationPropagation4HSJangCharacteristicsofUltrasonicsCharacteristicsofUltrasonics超超声声波的特性波的特性1.100%reflectionwhenitmeetsair(delamination)碰到空气(分

4、层或或离或离层)100%反射2.Reflectsatinterfaces在任何界面会反射3.Travelsstraightaslightbecauseoftheveryshortwavelength.由于它的波长非常短,所以和光线一样直线传播100%50%EMCAirDie50%5HSJangAdvantagesofUltrasonicsAdvantagesofUltrasonics超声波的优点超声波的优点1.Highresolution:很很高的分辨率很高的分辨率:DetectableminimumgapthicknessofSonix:0.13micrometerSonix能够检测到的最小

5、间隙厚度为0.13微米2.Highsensitivity:很很高的很高的灵敏度:Themeasuringofsize,location,shapeoffinedefectsispossible.能够检测出细微缺陷的大小,位置和形状3.Realtimeinspectionispossible.可以实时检测4.Safe:Harmlesstohumanbody.安全:对人人体人体体无害体无害6HSJangWeakPointsofUltrasonicsWeakPointsofUltrasonics超超声声波的弱点波的弱点1.Difficulttoinspectsamplesthathavearough

6、surfaceorbubbles.很难检测出表面很很粗很粗粗糙粗糙糙或者糙或者内部有很很多很多气泡的样品2.Liquidisrequiredtotransmitultrasonic需要液体进行超声波传输3.Needsexpertise(Solution:TAMI)需要专家分析和判断(解决方案:TAMI)100%100%100%roughsurfacebubbles7HSJangUsesforUltrasonicsUsesforUltrasonics超超声声波的用途波的用途1.Nondestructivetestequipment.(S.A.M.)超声波无损探伤测试设备(如:超声波扫描显微镜)2

7、.Sonartofindsubmarine,fish-finder用声纳找潜水艇和鱼群3.Medicalexaminationequipment身身体身体检查设备4.Cleaner(15~50KHz)超声波清洗机5.Humidifier超声波增湿机6.Welding(15~40KHz)超声波焊接8HSJangReasonsforUseofUltrasonicsReasonsforUseofUltr