Micromachined nanocrystalline SnO2 chemical gas sensors for electronic nose

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1、SensorsandActuatorsB102(2004)117125MicromachinednanocrystallineSnO2chemicalgassensorsforelectronicnoseJianweiGonga,QuanfangChena,∗,WeifengFeib,SudiptaSealbaDepartmentofMechanical,Material&AerospaceEngineering,UniversityofCentralFlorida,Orlando,FL32826,USAbAdvancedMaterialsProcessingandAnalysisCent

2、er(AMPAC),UniversityofCentralFlorida,Orlando,FL32826,USAReceived31July2003;receivedinrevisedform23February2004;accepted26February2004Availableonline15June2004AbstractMEMS-basedbatchfabricationcompatiblesolgelsynthesizedmesoporousnanocrystallineSnO2gassensorhasbeendeveloped.TheSnO2nanofilmisfabricat

3、edwiththecombinationofpolymericsolgelchemistryandblockcopolymersusedasstructuredirectingagents.Thenovelhydrogensensorhasafastresponsetime(2s)andquickrecoverytime(10s),aswellasgoodsensitivity(upto90),incomparingtootherhydrogensensorsdeveloped.Theworkingtemperatureofthesensordevelopedcanbereducedasl

4、owas100◦C.Thelowworkingtemperatureposesadvantagessuchaslowerpowerconsumption;lowerthermalinducedsignalshiftaswellassafedetectionincertainenvironmentswheretemperatureisstrictlylimited.ThenanocrystallineSnO2sensorhasabroadsensitivity.Thedevelopedsensorcellwillbeusedtodevelopahighsensitivityandhighse

5、lectivityelectronicnoseforharmfulchemicalgasdetectionbycombiningdifferentcatalystsdopedSnO2gassensorarraywithfuzzyneuralnetwork.©2004ElsevierB.V.Allrightsreserved.Keywords:MEMS;NanocrystallineSMO;Solgel;Electronicnose1.Introductiontionallystable,simpleandminimumneedsinmaintenance,enableforaminimal

6、lyskilledpersontooperateandcostThereisnosinglegassensorexistingthatis100%se-effective[1].lectivetoasinglechemicalgas[1].Therefore,agassensorInthepastafewdecades,semiconductormetaloxidearrayabletodetectdifferentinterestedgaseshasbeenama-(SMO)gassensorshaveemergedasefficientgasdetectionjorfocusofrese

7、archongassensorsforyears.Electronictools[1315].Comparedtoothergassensingtechniquesnose,asystemofasensorarray,hasawiderangeofpoten-suchasconductivepolymer,oscillating(QMB,BAW,tialapplicationssuchasairqualitycontro