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1、ELSEVIERSensorsandActuatorsB24-25(1995)537-539Tinoxide(SnOx)carbonmonoxidesensorfabricatedbythick-filmmethodsPingPingTsai,I-CherngChen,MingHannTzengIndustrialTechnologyResearchInstitute,MaterialsResearchLabomton’es,Bldg.77,195-5Chung-hsingRd,Sec.4,Chutun~Hsinchu31015,
2、TaiwanAbstractAnewwaytofabricatethick-filmsemiconductor-typetinoxide(SnOx)carbonmonoxidesensorsisreportedinthispaper.Thesensingmaterialismadebymetallo-organicdecompositionandiscomposedofcalciumoxide-andniobiumoxide-dopedtinoxidewithplatinumasacatalyst;theelectrodesand
3、theheateraremadebyscreenprinting.Sensingmeasurementsaredonebycyclingthesensortemperaturewithhighandlowheatingpowers.TheCOresponsecurveisalmostlinearatCOconcentrationsbelow400ppm.ThesensorcandetectCOconcentrationsbe.low30ppm.TheCOresponsewithtime,COsensitivity,operatio
4、ntemperatures,powerconsumption,reliabilityofthesensorandalsotheselectivityofthesensortovariousgaseshavebeeninvestigated.Keywomb:Carbonmonoxidesensors;Thick-filmsensors;Tinoxide1.Introduction2.ExperimentalThick-filmcarbonmonoxidesensorswerefabricatedSemiconductorgassen
5、sorscanbeclassifiedaccordingaccordingtothebasicmethoddescribedinourprevioustothefabricationmethodintothefollowingtypes:publications[N-12].Thesensorwasmadebyspin-sinteredbulktype,thick-filmtypeandthin-filmtypecastingofmetalorganicsonthealuminasubstrate,[l-7].Mostcommer
6、cialsensorsnowinusearethefollowedbymetallo-organicdecomposition(MOD)andsinteredbulktypeandthethick-filmtype.Inthehistoryscreenprintingofelectrodesandheatingelements.Fineofsemiconductor-typecarbonmonoxide(CO)sensors,crystallinetinoxidedopedwithcalciumoxideandthebulk-ty
7、pesensorwasfirstdevelopedbyFigaroniobiumoxidewasformedasthesensinglayer.Theestimatedcompositionofthesensingmaterialinwt.%EngineeringInc.in1974;later(in1983)themethodwasCaO:Nb,O,:SnO,=5:5:90.Thecatalystwaspre-ofmeasurementwasmodifiedbytemperature.Further,in1991Figaroan
8、nouncedthedevelopmentofamin-iaturized,pulse-driventhick-filmCOsensor[8].Thecyclingofsensortemperaturecouldhelpinpurgingthese
