MODELING AND FEEDBACK CONTROL OF A MEMS ELECTROSTATIC ACTUATOR

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1、MODELINGANDFEEDBACKCONTROLOFAMEMSELECTROSTATICACTUATORJASONM.EDWARDSBachelorofElectricalEngineeringClevelandStateUniversityMay,2004submittedinpartialfulfillmentofrequirementsforthedegreeMASTEROFSCIENCEINELECTRICALENGINEERINGattheCLEVELANDSTATEUNIVERSITYDecember,2008Thisthesishasbeenapprovedforth

2、eDepartmentofElectricalandComputerEngineeringandtheCollegeofGraduateStudiesby________________________________________________ThesisCommitteeChairperson,LiliDong________________________________Department/Date________________________________________________Dr.ZhiqiangGao___________________________

3、_____Department/Date________________________________________________Dr.DanSimon________________________________Department/DateACKNOWLEDGEMENTSFirstofall,Iwouldliketothankmyemployerforbeingpatientandsupportingthefurtheringofmyeducation.Withouttheirsupport(temporalandfinancial)thisthesiswouldn’tbe

4、possible.Secondly,Iwouldliketothankmyadvisor,Dr.Dong,fornotonlyhelpingmechoosemythesistopic,butalsoforthetedioushoursproofreadingit.Iwouldalsoliketothankmythesiscommittee,Dr.Dong,Dr.GaoandDr.Simonforhelpinginstillmyknowledgeofcontrols,andintheend,lettingmeknowthatIhaveonlybegunmyjourneytounderst

5、anding.Finally,IwouldliketothankmyfamilyforputtingupwithmewhileIfinishthisstageofmyacademiccareer.MODELINGANDFEEDBACKCONTROLOFAMEMSELECTROSTATICACTUATORJASONM.EDWARDSABSTRACTThisthesisdescribesthemathematicalmodelingandclosed-loopvoltagecontrolofaMEMSelectrostaticactuator.Thecontrolgoalistoexten

6、dthetravelrangeoftheactuatorbeyondtheopen-looppull-inlimitofonethirdoftheinitialgap.Threecontrollerdesignsarepresentedtoreachthecontrolgoal.ThefirstcontrollerdesignutilizesaregularfourthorderActiveDisturbanceRejectionController(ADRC)andisabletoachieve97%ofthemaximumtravelrange.Theseconddesignals

7、ousesafourthorderADRC,whileadditionalmodelinginformationisincludedinanExtendedStateObserver(ESO),whichispartoftheADRC,toimprovecontrolperformance.Thiscontrollerachieved99%ofthetravelrange.Thethirddesignisamulti-loopcontrolle