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1、Multi-GasSensorbyInfraredSpectrometerTetsuyaEnomoto,TomokiTanemura,ShuichiYamashita,HiroyukiWado,YukihiroTakeuchiandYutakaHattoriAbstractInordertodetectmanytypesofgases(CO2,NOx,SOx,C2H5OH)intheautomotivecabinbyinfraredabsorptionsensor,wedevelopedanovelmicroelectromechanicalsystems(MEMS)basedFabry
2、Perotspectrometerwithanultrawidewavelengthrange(3.208.40lm)comparedtopreviouslyreportedspec-trometers(typically2.805.80lm).ThewavelengthrangeofaFabryPerotspectrometerisknowntoincreasebyincreasingtheratiooftherefractiveindicesofthemultilayermirrors.Thus,anovelmirrorstructurewasproposedreplacingthe
3、lowrefractiveindexlayerofSiO2(nL=1.44)withair(nL=1.00)forawiderwavelengthrange.Tofabricatetheproposedstructure,theinternalstressofthefourultra-thinpolycrystallinesiliconfilms(ca.320nm)wascontrolledtensilebythedepositiontemperature.Agassensorwasfabricatedusingourdevelopedspectrometer.Itwasfoundthat
4、thesensordetectedCO2andC2H5OHsuccessfully.KeywordsInfraredabsorptionsensorGassensorFabryPerotspectrometerMEMS1IntroductionRecently,thereisincreasingdemandforthedetectionofmanytypesofgases(CO2,NOx,SOx,C2H5OH,andsoon)intheautomotivecabin.Therearetwotypesofgassensors;chemicalsensorsandphysicalsen
5、sors.ChemicalsensorssuchasF2012-D05-003T.Enomoto(&)T.TanemuraS.YamashitaH.WadoY.TakeuchiY.HattoriDENSOCorporation,Kariya,Japane-mail:TETSUYA_ENOMOTO@denso.co.jpSAE-ChinaandFISITA(eds.),ProceedingsoftheFISITA2012World611AutomotiveCongress,LectureNotesinElectricalEngineering194,DOI:10.1007/978
6、-3-642-33829-8_57,ÓSpringer-VerlagBerlinHeidelberg2013612T.Enomotoetal.Fig.1SchematicdiagramGasabsorptionFabry-PerotofinfraredabsorptiongasInfraredsourceInfraredsensorcellspectrometersensorGasmoleculeCanpackagemetaloxidegassensorscannotidentifyandquantifymorethantwogaseswithasinglesensorbecauseoft
7、heirlowerselectivityformanytypesofgases[1].Ontheotherhand,physicalsensorssuchasinfraredabsorptionsensorsdetectmanytypesofgaseswithasinglesensorbecauseoftheirexcellentselectivityformanytypesofgasesduetothedifferentabsor
