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1、ThesecondexhibitionofCarlZeissconfocallaserscanningmicroscopeConfocalMicroscopyDr.MatthiasVaupel,CarlZeissMicroImagingGmbH,Göttingen,GermanySeiteLSM700ConfocalPrincipleMaindifferencesincomparisontodetectorclassicallight&videomicroscopy:pinhole1)Illuminationsource:Laserinsteadoflampbeamsplitterlas
2、er2)Imageacquisition:Sequentialscanningofthesamplewithalaserbeammirrorsxylenssample3)3DMicroscopy:focusHeightinformationbyopticalslicingzCZ-MI,MatthiasVaupel,TASC2009Seite2LSM7003DImaging:SolarSolarpanellaserscribeCZ-MI,MatthiasVaupel,TASC2009Seite3TheconfocalmicroscopesLSM700andCSM700–Whatarethe
3、ygoodfor?3Dmicrostructureanalysis,e.g.°z-heightpropfile°xyz-distancesandanglesintopography°roughness°thintransparentfilmthickness°volumeparameters°bearingareacurve,amplitudedensityfunction°Imageprocessingandanalysis°ReportingMaterials:°Softmatter,i.e.polymers°Metal°Paper°GlassCZ-MI,MatthiasVaupel
4、,TASC2009Seite4SpecificationsCSM700Heightmeasurement:°repeatability(1σ)0.020μm°16-bitresolutioninheight°Heightmeasurement15mmmaximumrange°Maximumsampleheight63mmLateralmeasurement:°resolution0.160μm°Imagepixelresolution1280x1024pixels°IlluminationXenon-Lamp(wavelengthrange:400to700nm)°Acquisition
5、speed7.5fps(High-speed)...100fps(Wire-framemode)°Colordepth3x8bit(RGB)CZ-MI,MatthiasVaupel,TASC2009Seite5USPsandTopFeaturesofCSM700USPs:°Confocalimagesintruecolor->topo&coloredtexture(allinfocusimage)injust1step!°High-speed-mode7.5fps(<30sec)at1280x1024pixels°ZeissobjectivesgivehighestZeissoptica
6、lperformanceTops:°CompleteSoftwarepacket,incl.ImageProcessing,MacroProgramming,ImageStitching,Reporting°Filmthicknessmeasurement°AvailablewithmotorizedstageforscanningandstitchingoflargeimagesCZ-MI,MatthiasVaupel,TASC2009Seite6Specifications:LSM700onAxioScopeorAxioImagerHeightmeasurement:°repeata
7、bility0.020μmwithclosed-loop-detector(Heidenhain-detector)andAxioImager,0.080µmonAxioScopemot°16-bitresolutioninheight°Heightmeasurementappr.15mmmaximumrange°Maximumsampleheight63mmwithAxioImager2Lateralmeasurement:°re
