不错的OLED结构及工艺简介

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1、OLEDTechnologyOLEDTechnologyDavidHsiehContents•OLEDDevelopmentStatus¾KeyMilestone¾Resolutionvs.Size¾AMandPMDevelopmentDisplay•MaterialsStatus:Polymervs.SmallMolecule¾EfficiencyProgress¾LifetimeProgress•Tech.StatusofOLEDColorpatterning•PendingIssuesinOLED¾Out-couplingEf

2、ficiency¾LifetimeDifferentialAging¾LTPSNon-UniformityforAMOLED•ConclusionOLEDDevelopmentStatusßKeyMilestoneofOLEDDevelopment1995199920002002Pioneer,PM-95KodakDigitalSony13”SVGACamera-03Pioneer,PM,4AreaMotorolaCellularAMOLED-01Color-99Phone-00CDT-SeikoEpson2.5”AMPLED-00

3、Samsung15”XGAChi-Mei&IBM5.7”PM-OELDAMOLED-0120”WXGAa-SiIdemistu-97Sanyo-KodakAMOLED-032.4”AMOLED-99OLEDDevelopmentStatusßPMCommercializedDisplays¾PMMobilePhone(SmallMolecule)MotorollaSamsungLG(Pioneer)(SNMD)(Pioneer)OLEDDevelopmentStatusßSamsungNECMobileDisplay(SNMD)PM

4、OLEDProducts☞CurrentProduct1.1”94×64Dots,256ColorAnycall(SEC)SubDisplayMassProductionfrom2002.July☞NextProductType1Type2Type396×64+Icon96×9696×64+Icon256color65kcolorAreacolorApplicationsofOLED*S/M:SmallMoleculeNextStep•Cellphones(maindisplay)•PDAs•Smallvideo(DVC,DSC)M

5、obileMobileMobileLargeS/M*FlexibleMonoFullColorS/M*,PolymerPolymerPMOLEDPMOLEDAMOLEDAMOLEDAMOLED~2001~2003~2004~2007~2009Final&LongTermNow&Near-term•MobileApplications(Flexible)•Cellphones(subdisplay)•Monitors•Autodisplays•TVs•audio,meters,appliancesPassiveMatrixDispla

6、ys:ProcessFlow380x470AZ5214BusBusMetalPRBusResistGlassClean&glassITOCrMetalPRCoatThicknessExpose(MaskBakepanelsstart&Bake(1.7µm)#1)BusResistBusCD&BusEtchandBusPRStrip,DehydrationDevelopInspectInspectInspect&CDBakeITOPRITOResistITOPRCoatITOResistITOCDandThicknessExpos

7、eandBakeDevelopInspect(1.7µm)(Mask#2)AZ5206-EBaseBasePRITOEtchandITOPRStrip,DehydrationPRCoatandThicknessInspectInspect&CDBakeBake(0.6µm)BaseResistAZ5214PillarBaseResistBaseCDandBaseCure-HotExpose(MaskPRCoat&DevelopInspectPlate#3)BakePillarPRPillarPRPillarPRPostContinu

8、eThicknessExposeExposureBake(1.7–3.7µm)(Mask#4)PassiveMatrixDisplays:ProcessFlow(continued)PillarPRFloodPillarPRPilla