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1、SEMIG52-90N/A©SEMI1990,1996STANDARDTESTMETHODFORMEASUREMENTOFIONICCONTAMINATIONONSEMICONDUCTORLEADFRAMES(PROPOSED)NOTE:Japan,Europe,andUStaskforcesareplanning5.4retentiontimeÑThetimerequiredforaparticu-todeveloptestmethodswhichwilladdressthediffer-lariontypetopassfromtheinjectionpo
2、rttothedetec-entlevelsofioniccontaminationonleadframes.tor.Retentiontimeischaracteristicallydifferentforeachiontype.1Scope6EquipmentThisstandarddescribestheproceduretodetermineioniccontaminationonleadframesusingawater6.1Ionchromatographforanionandcationanalysis.extractionmethod.The
3、methodissensitivetoNa+,Thisequipmentistoconsistofaconcentrationpump,NH+,K+,Cl-,NO-,Br-,SO2-,PO3-.guardcolumn,separatorcolumn,andadetectormodule4344consistingofasuppressordevicetoreducetheback-2ApplicableDocumentsgroundeluentconductivitytoalowlevelandaconduc-1tivitycell.Theminimumse
4、nsitivityofthe2.1ASTMSpeciÞcationschromatographforeachiontypeisdeÞnedinTable1.D4327ÑAnionsinWaterbyIonChromatography6.2ChartRecorderD1193ÑSpecificationforReagentWater6.3IonExtractionVesselsÑPolypropyleneortefloncontainerswithsealingcaps,orpolypropylene/polyeth-3SummaryofMethodylene
5、doublelayeredbags.Ioniccontaminationisextractedinwaterat>95¡Cfor30±2minutes.ThecontaminationisquantitativelyNote:ThecontaminationlevelofthesevesselsmustbeanalyzedbyiontypeusingIonChromatographyandlessthanone-Þfth(1/5)oftheexpectedcontaminationtheresultispresentedasnanograms/unitare
6、a.levelontheleadframeswhenmeasuredinacontroltest.4SigniÞcance6.4Hotbarbagsealer.4.1Contaminationonleadframescancontributeto6.5Waterbath,300mmL´300mmW´200mmH,semiconductordevicereliabilityproblems.ThisÞlledwithDIwater,andcapableofholding95¡C.methodmaybeusedbyleadframemanufacturersat
7、outgoinginspectionandbyusersatincominginspec-6.6VolumetricDispenser(e.g.,Pipettes)Ñ10mlandtion.Correlationofdevicereliabilitywithcontamina-100mlcapacity.tionlevelsmayleadtoimprovedleadframecleaning6.7QuartzFlasksandPipettesforCationStandardprocesses.SolutionsÑ100,250,500,and1000mlc
8、apacity(flasks);1,10,and25
