光刻技术及应用

光刻技术及应用

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时间:2019-04-29

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1、LithographyLithography(fromGreekλ??θο??,lithos,"stone"+γρ??φειν,graphein,"towrite")isamethodofprintingoriginallybasedontheprinciplethatoilandwaterdonotmix.[1]Printingisfromastone(lithographiclimestone)orametalplatewithasmoothsurface.Itwasinventedin1796byGerman

2、authorandactorAloisSenefelderasacheapmethodofpublishingtheatricalworks.[2][3]Lithographycanbeusedtoprinttextorartworkontopaperorothersuitablematerial.[4]Lithographyoriginallyusedanimagedrawnwithoil,fat,orwaxontothesurfaceofasmooth,levellithographiclimestonepla

3、te.Thestonewastreatedwithamixtureofacidandgumarabic,etchingtheportionsofthestonewhichwerenotprotectedbythegrease-basedimage.Whenthestonewassubsequentlymoistened,theseetchedareasretainedwater;anoil-basedinkcouldthenbeappliedandwouldberepelledbythewater,sticking

4、onlytotheoriginaldrawing.Theinkwouldfinallybetransferredtoablankpapersheet,producingaprintedpage.Thistraditionaltechniqueisstillusedinsomefineartprintmakingapplications.Inmodernlithography,theimageismadeofapolymercoatingappliedtoaflexiblealuminumplate.Theimage

5、canbeprinteddirectlyfromtheplate(theorientationoftheimageisreversed),oritcanbeoffset,bytransferringtheimageontoaflexiblesheet(rubber)forprintingandpublication.Asaprintingtechnology,lithographyisdifferentfromintaglioprinting(gravure),whereinaplateiseitherengrav

6、ed,etched,orstippledtoscorecavitiestocontaintheprintingink;andwoodblockprinting,andletterpressprinting,whereininkisappliedtotheraisedsurfacesoflettersorimages.Today,mosttypesofhigh-volumebooksandmagazines,especiallywhenillustratedincolour,areprintedwithoffsetl

7、ithography,whichhasbecomethemostcommonformofprintingtechnologysincethe1960s.Thewordlithographyalsodenotesphotolithography,amicrofabricationtechniqueusedinthemicroelectronicsindustrytomakeintegratedcircuitsandmicroelectromechanicalsystems.Theprincipleoflithogra

8、phy10Lithographyusessimplechemicalprocessestocreateanimage.Forinstance,thepositivepartofanimageisawater-repelling("hydrophobic")substance,whilethenegativeimagewouldbewater-retainin

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