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1、TFT-LCDProcessand FabDesignWhatisTFT-LCD?Thin-FilmTransistor(TFT)LiquidCrystalDisplay(LCD)LCDapplication1950s“niche”researchMulti-Billionindustrytoday!!!ApplicationofTFT-LCDMonitorNotebookPCTVOtherapplicationHowTFT-LCDworks~~彩色濾光片上偏光片下偏光片背光源TFT基板液晶層TFTTu
2、rnOFFTFTTurnON光源經液晶層扭轉90°LCDDisplayTheoryBasicComponentsofTFT-LCD基本構造背光板(BACKLIGHT)下偏光片(DOWNPOLARIZER)薄膜基板(TFTSUBSTRATE)液晶(LIQUIDCRYSTAL)彩色濾光片(COLORFILTER)上偏光片(UPPOLARIZER)Howcolordisplayworks紅藍綠黃白紫青DATADRIVERICSCANDRIVERICTFTRGBRGBRGBRGBRGBRGBRGBRGBRGBR
3、GBRGBRGBRGBRGBRGBRGBRGBRGBRGBRGBTFT-LCDProcessTFT(Array)Thin-FilmTransistorLC(Cell)LiquidCrystalLCMModuleArray:電晶體(矩形陣列)TFT基板生成Cell:面板生成(Panel)Module:產品模組組裝TFT-LCDProcess薄膜ThinFilm黃光PhotoColorFilterOK蝕刻Etch測試ArrayTest基板投入SubstrateCELLTFTProcessTFTProcess
4、BOX5道光罩薄膜黃光蝕刻素玻璃GlassSubstrateTFT基板TFTProcess鍍膜(sputter,cvd)上光阻(coater)光罩(reticle)顯影(developer)顯影液對準,曝光(stepper)蝕刻(etch)去光阻液stripper去光阻酸,氣體鍍下一層膜TFTProcess(1)上光阻(coating)鍍第一層膜空白玻璃酸,氣體光罩對準,曝光(stepping)顯影液顯影(developing)蝕刻(etching)TFTProcess(2)顯影去光阻液去光阻(stri
5、ping)鍍第二層膜上光阻對準,曝光光罩顯影液酸,氣體蝕刻TFTProcess(3)去光阻液光阻剝離鍍第三層膜,請依之前所示範的方法舉一反三,自行模擬想像CELLProcess(1)TFT基板(TFTSubstrate)彩色濾光片(ColorFilter)CELLProcess(2)PI塗佈PICoatingPI塗佈PICoating配向Rubbing配向RubbingSpacer灑佈SpacerSpray框膠SealantDispenser點銀膠AgDispenser對位Misalignment熱壓H
6、otpress切割裂片Scribe&Break液晶注入LCinjection封口Endsealing再配向Isotropic偏光片貼片PolarizerAttachment加壓脫泡AutoClaveCell測試CelltestTFTCFColorFilterinTFT-LCD下偏光片薄膜(TFT)基板液晶電晶體彩色濾光片上偏光片線路TFT-LCDSection螢光灯泡背光模組偏光板偏光板TFTArray液晶層ColorFilterWhatis“Pixel”?畫素結構圖PixelandColorFilte
7、r610mm720mm畫素(PIXEL)★構成螢幕上所有顏色的單位主要以三元色為主(紅、綠、藍)★其中紅、綠、藍三色則稱為子畫素畫素子畫素彩色濾光片ColorFilterRGB-3Basiccolors紅藍綠黃白紫青Sub-PixelTypesMosaicTriangleStrip適合AV動畫，小尺寸panel之設計。常用於Monitor，NB等大尺寸Panel。CFProcessCFProcessCrGlassInputColorFilterOutputBlackMatrixRsub-pixelGsu
8、b-pixelBsub-pixelandthenITOPositiveresistCoating,Dosing,Developing,Post-baking,Etching,Stripping.RNegativeresistCoating,Dosing,Developing,Post-baking.GNegativeresistCoating,Dosing,Developing,Post-baking.BNegativeresistCoat
