利用晶体生长软件FEMAG对蓝宝石晶体生长的仿真计算方法.ppt

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1、CONFIDENTIAL利用晶体生长软件FEMAG对蓝宝石晶体生长仿真模拟方法FEMAGSoftS.A.,BelgiumASPIN-OFFcompanyfromUniversitecatholiquedeLouvainBelgiumProfessorF.DupretCONFIDENTIALGeneralintroductionSapphireGrowthContentCONFIDENTIALIntroductionFormorethan25years,FEMAGSoftdevelopssimulationsoftwarededicatedtotheresearcha

2、nddevelopmentofoptimalcrystalgrowthprocesses.1984FirstresearchonGermaniumgrowthinUniversityofLouvain.Prof.FrançoisDupret1989FirstresearchonSilicongrowthinUniversityofLouvain.1992FirstcollaborationswithmajorICcompanies.Developmentofdefect-freesiliconwaferproduction.Today,morethan35patent

3、sarereferencingFEMAGSoftware2003FEMAGSoftS.A.,spin-offfromUniversityofLouvain.2006CollaboratrionwithmajorSolarcompanies.Developmentoflow-costandlow-oxygencontentprocesses.2009Largeinvestmentforanewsoftwareframework2010ReleaseofSoftwareapplicationforSapphireingotproduction.CONFIDENTIALCzo

4、chralskiprocessCONFIDENTIALDirectionalSolidificationSystemCONFIDENTIALFloatingZoneProcessCONFIDENTIALSapphireGrowthbyCZandkyropoulosCONFIDENTIALSapphiregrowthbyHEMCONFIDENTIALWhatareFEMAGsoftware?Process-dedicatedsimulationtools,adaptedtoyourownprocessesandabletosolveyourproblems.GlobalA

5、llthefurnacecomponentsareconsidered.Alltheheattransfermodeareconsidered(radiationtransfer,heatconduction,meltandgasconvection)InductionandohmicheatingTimeDependentCONFIDENTIALProcess-dedicatedtoolsFEMAG-CZ:CzochralskiFEMAG-FZ:FloatingZoneFEMAG-VB:VerticalBridgmanFEMAG-CZ/OX:Czochralskifo

6、rSapphireFEMAG-KY:KyropoulosFEMAG-DS:DirectionalSolidificationFEMAG-HEM:HeatExchangeMethodGainoftime.ProcessmasteringAccurateandrighttothepointCONFIDENTIALPlatformorientedFRAMEWORK:FEMAG3RADIATIONCONVECTION…MESHGEOMETRYCONDUCTIONFEMAG-CZFEMAG-HEMFEMAG-DSFEMAG-KYROPOULOSFEMAG3NEW2011Verya

7、ccurate:FiniteElementandSpectralmethodsVeryefficient:3Dsimulationsinless1dayVeryflexible:Veryfastdevelopmentofnewdemand…CONFIDENTIALGlobalsimulationsCzochralskiFurnaceforSiliconHEMFurnaceforSapphireNosimplificationoftheprocessconditionsCONFIDENTIALDynamicsimulationsAdynam