接触式电容微加速度传感器的设计与分析.pdf

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1、第27卷第2期传感技术学报Vo1．27No．22O14年2月CHINESEJOURNALOFSENSORSANDACTUATORSFeb．2014DesignandAnalysisofaTouchModeCapacitiveMicroaccelerometerLIU，CHENSong，GUWenwen(1．CollegeofMechanicalEngineering，ChongqingUniversityofTechnology，Chongqing400054，China2．CollegeofEng

2、ineeringandTechnology，SouthwestUniversity，Chongqing400044，China)Abstract：Touchmodeeffectisthemostimportantsubjectfl0rthetouchmodesensor．BylookingatMEMSdevices．therehavebeengoodsuggestionsforsolvingthetouch．downproblems，butasoftodaynoneoftheliteraturesh

3、ascomeuptoafinalanalyticalsolutionforcalculatingthetouchdowneffect．Inthispaper．anoveltouchm0decapacitivemicroaccelerometerisdeveloped．Asimpleanalyticalsolutionispresentedtomodeltheflexion0fthecircu1ardiaphragmwithclampededgesbeforeandaftertouchpointund

4、ertheload．wherethetouchdownefectandtheevolutionoftouchradiusareconsidered．A1loftheselayafoundationfl(】rthedevelopmentofthetouchm0desensor．Keywords：MEMS；touchmode；capacitivesensing；microaccelerometer；circulardiaphragmEEACC：7230doi：10．3969／j．issn．1004—16

5、99．2014．02．002接触式电容微加速度传感器的设计与分析：l=刘妤，陈松，顾雯雯(1．重庆理T大学机械程学院，重庆400054；2．西南大学工程技术学院，重庆400044)摘要：设计了一种新型接触式电容微加速度传感器。针对传感器结构，建立了考虑接触效应的周边固支阋形膜片在载荷作用下与基底“接触”前后的简化分析模型，并给出了接触半径的计算公式。为接触式传感器的研制奠定了理论基础。关键词：MEMS加速度传感器；接触式；电容传感；圆膜片中图分类号：TP212文献标识码：A文章编号：l0O4一l69

6、9(2Ol4)02—0158—04Accelerometerisoneofthefirstdevicestoinputchangesandthesensitivityinthenear—lineardemonstratedusingMEMStechnology．ThewideregionisnothighenoughtoignoretheparasiticspectrumofapplicationsforMEMSaccelerometersiscapacitanceeffects．Inthispap

7、er，anoveltouchmodeattributedtotheirsmallsize．highsensitivityand1owcapacitivemicroaccelerometerisdevelopedtoovercomecost．Althoughmanyphysicaleffectscanbeusedforac．thedisadvantagesoftheclassicalcounterparts．celerationsensing，thecapacitivesensingmechanism

8、isTouchmodeeffectisthemostimportantsubject．ItdominantduetocapacitiveMEMSaccelerometerwithhasamajoreffectontheoverallperformanceofthehighsensitivity，lowpowerconsumption，lownoiseleveltouchmodesensor]，．BylookingatMEMSdevices，stableDCcharac