B和H离子顺次注入单晶Si引起的缺陷及其热演变-论文.pdf

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1、第30卷第4期原子核物理评论、，0l_30．No．42013年12月NuclearPhysicsReviewDec．．2013ArticleID：1007．4627(2013)04—0471—06ThermalEvolutionofDefectsinCrystallineSiliconbySequentialImplantationofBandHIonsZHANGBei，ZHANGPeng，WANGJun，ZHUFei，’，1CAOXingzhong，ⅥNGBaoyi‘，LIUChanglong(J．

2、SchoolofScience,TianjinUniversity,Tianjin300072，China；2．KeyLaboratoryofNuclearAnalysisTechniques,InstituteofHighEnergyPsics，ChineseAcademyofSciences,Beqing100049,China；3．TianjinKeyLaboratoryofLowDimensionalMaterialsPhysicsandPreparingTechnology,Institut

3、eofAdvancedMaterialsPhysicsFacultyofScience，Tianjin300072，China)Abstract：Czn-typeSi(100)wafersweresinglyorsequentiallyimplantedatroomtemperaturewith130keVBionsatafluenceof5×1014cm一2and55keVHionsatafluenceof1×1016cm一2．Theimplantation．induceddefectswerein

4、vestigatedindetailbyusingcross—sectionaltransmissionelectronmicroscopy(XTEM)andslowpositronannihilationtechniquefSPAT)．XTEMresultsclearlyshowthatsequentialimplantationofBandHionsintoSicouldeliminatethe(1l1)plateletsandpromotegrowthof(1OO)plateletsduring

5、annealing．SmeasurementsdemonstratethatinBandHsequentiallyimplantedandannealedSi，morevacancy—typedefectscouldremaininsampleregionaroundtherangeofBions．TheseresultsindicatethatthepromotionefectshouldbeattributedtotheroleofbomBandBimplantedinducedvacancy-t

6、ypedefects．Keywords：crystallineSi；Band／orHionimplantation；Hplatelets；XTEM；SPATCLCnumber：0483Documentcode：ADOI：10．11804／NuclPhysRev_30．04．4711Introductionefective．Forexample，Tongeta1．demonstratedthatahigh—qualitySOIstructurewasfabricatedatatotalfluence‘s

7、mart-Cut’isanovel，promisingproductiontechno—of2．85×1016cm一[3】．Astotheunderlyingmechanism．logyofsilicon-on-insulator(SO1)systems．Eversinceitre-someviewpointshavebeenproposed．Tongeta1．con—po~edf0rthefirsttimebyBmel[11．thistechnologyhasat-sideredthatahighn

8、umberofpointdefectsweregenera-tractedmoreattentionsandfoundpracticalapplicationsintedbypre-implantedBions，andBionsthemselvescouldthefieldofSOI．The‘Smart—Cut’ismainlybasedonhydro—traphydrogenatoms．Bothprocessesarelikelytoassistgen