电容式加速度传感器课程设计1003030304.doc

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1、摘 要 随着科学技术的不断发展，自动化智能化一步一步走入人们生活中的每一个角落。然而自动化与智能化的实现无疑离不开传感器。传感器这个大家族之中，电容式传感器又占有举足轻重的位置。电容器传感器的优点是结构简单,价格便宜，灵敏度高，零磁滞，真空兼容，过载能力强，动态响应特性好和对高温、辐射、强振等恶劣条件的适应性强等。缺点是输出有非线性，寄生电容和分布电容对灵敏度和测量精度的影响较大，以及联接电路较复杂等。本课程设计设计了一种基于MEMS的电容式测量加速度的传感器。 基于微机电系统(MEMS)技术的微机械加速度传感器具有体积小、质量轻、

2、启动快、功耗低、易集成、可靠性好、抗过载能力强和成本低廉等诸多优点，在航空航天、汽车技术机器人技术、工业自动化、掌上电子产品等诸多领域得到了广泛的应用。根据其敏感信号方式，可以分为微型电容式速度传感器、微型压阻式加速度传感器、微型压电式加速度、感器和微型隧道电流式加速度传感器等。关键词：电容加速度传感器信号放大微电子机械系统目录第一章绪论···············································31.1 课题研究的相关背景······························31.2 选题的

3、目的和意义 ·······························41.3 课题研究的容··································51.4 国外研究现状··································51.5 传感器目前存在的主要问题························5第二章结构设计··········································62.1微机械电容式加速度计的结构设计原则·············62.2微机械电容式加速度计的三种

4、常见结构·············62.3电容式加速度传感器设计方法选择与优化···········72.4电容加速度传感器结构梁的设计···················102.5微机械电容式加速度传感器的设计参数··············142.6传感器工作原理及数据计算························162.7微机械加工工艺·································17第三章测控电路·········································183.1转换电路·

5、······································183.2正弦波产生电路·································193.3仪用放大器······································203.4相敏检波电路····································213.5滤波电路········································22第四章技术指标·································

6、·········234.1壳体固定要求····································234.2滑块与壳体接触面的光滑度要求····················234.3测控电路的要求··································23第五章传感器适用围·····································235.1影响适用围的因素······························235.2加设重力加速度传感器 ·····················

7、·······23第六章总结与展望········································246.1数据关系········································246.2与书本上面的测加速度传感器对比··················24 第七章总结与展望········································247.1总结············································247.2展望················

8、····························24参考文献·················································25附录1·····························