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1、11本科毕业设计(论文)题目:纳米级DLC膜的力学性能研究院(系):光电工程学院专业:光电信息工程班级:080111学生:刘彬彬学号:080111111指导教师:惠迎雪2012年6月1纳米级DLC膜的力学性能研究摘要类金刚石碳(DLC)膜,具有高硬度、高耐磨性、低摩擦系数、高热导率、高红外透过率、高化学稳定性等一系列与金刚石膜相似的优异性能。与金刚石膜相比,其具有沉积温度低、沉积面积大、膜面平整光滑、成本低等优点,是一种优良的红外增透保护材料。本文采用非平衡磁控溅射法在单晶硅基底上沉积制备非氢和含氢DLC薄膜,通过改变沉积
2、时间以获取不同厚度的薄膜样品,进而采用纳米压痕仪对薄膜样品的硬度进行测量,分析了薄膜制备工艺对薄膜力学性能的影响,并在此基础上对非氢和含氢DLC薄膜的力学性能进行了分析比较。研究结果表明:对于无氢DLC薄膜,保持其他工艺条件不变,薄膜的几何厚度会随着沉积时间近似成线性增长,但对于含氢的DLC薄膜,除了受到沉积时间的影响,甲烷气体流量比是影响薄膜厚度的重要因素;非氢DLC薄膜的硬度随着其厚度的增大而增高,而含氢DLC并未见相似规律,对于含氢DLC薄膜,其硬度明显受到反应气体流量的影响,随着CH4:Ar气体流量比的增加,薄膜的
3、硬度逐渐减小,总体而言,非氢DLC薄膜的硬度要大于含氢DLC薄膜的硬度。论文主要围绕UMBS技术沉积的非氢和含氢DLC薄膜力学性能展开研究,旨在为制备性能良好的非氢和含氢DLC薄膜提供实验依据。关键词:类金刚石(DLC)薄膜;非平衡磁控溅射;力学性能;显微硬度IMechanicalPropertiesOfNanoscaleDLCFilmsAbstractDiamond-likecarbon(DLC)filmisanamorphouscarbonfilmthatexhibitsaseriesofexecellentprope
4、rtiessuchashighhardness,goodchemicalinertness,highthermalconductivity,goodtransmittanceininfraredandlowwearcoefficient.Comparedwithdiamondfilm,DLCfilmhaslowerdespositiontemperature,largerdepositionscaleandsmoothersurface.ItcanbeusedasanewIRantireflectiveandprotect
5、ivematerial.Usingunbalancedmagnetronsputteringdepositiononamonocrystallinesiliconsubstratenon-hydrogenandhydrogen-containingDLCfilms,bychangingthedepositiontimetoobtainfilmsamplesofdifferentthickness,andthenusingthenanoindentationinstrumentmeasuringthehardnessofth
6、efilmsamples,Analysisofthinfilmdepositionprocessonthemechanicalpropertiesoffilms.Onthisbasis,themechanicalpropertiesofthenon-hydrogenandhydrogen-containingDLCfilmswereanalyzedandcompared.Theresultsshowthat:Forthehydrogen-freeDLCfilms,Otherconditionsremainunchanged
7、,thegeometricthicknessofthefilmswithdepositiontimeisapproximatelylineargrowth.However,forhydrogen-containingDLCfilm,inadditiontothedepositiontimeaffectthe,methanegasflowratioisanimportantfactoraffectingthefilmthickness;non-hydrogenDLCfilmhardnesswiththeincreaseofi
8、tsthicknessincreased,hydrogen-containingDLCandnosimilarrules.Forhydrogen-containingDLCfilms,itshardnessisobviousbythereactiongasflow,WithCH4:Argasflowra