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1、OperationsResearch/ComputerScienceInterfacesSeriesVolume52SeriesEditors:RameshShardaOklahomaStateUniversity,Stillwater,Oklahoma,USAStefanVoßUniversityofHamburg,Hamburg,GermanyForfurthervolumes:http://www.springer.com/series/6375LarsMönch•JohnW.Fowler•
2、ScottJ.MasonProductionPlanningandControlforSemiconductorWaferFabricationFacilitiesModeling,Analysis,andSystems123LarsMönchJohnW.FowlerDepartmentofMathematicsW.P.CareySchoolofBusinessandComputerScienceDepartmentofSupplyChainUniversityofHagenManagementU
3、niversitätsstraße1ArizonaStateUniversityHagen,GermanyTempe,AZ,USAScottJ.MasonDepartmentofIndustrialEngineeringClemsonUniversityFreemanHall124Clemson,SC,USAISSN1387-666XISBN978-1-4614-4471-8ISBN978-1-4614-4472-5(ebook)DOI10.1007/978-1-4614-4472-5Spring
4、erNewYorkHeidelbergDordrechtLondonLibraryofCongressControlNumber:2012944171cSpringerScience+BusinessMediaNewYork2013Thisworkissubjecttocopyright.AllrightsarereservedbythePublisher,whetherthewholeorpartofthematerialisconcerned,specificallytherightsoftr
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