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ID:49531650
大小:5.87 MB
页数:38页
时间:2020-02-07
《vacuum pump(真空泵).ppt》由会员上传分享,免费在线阅读,更多相关内容在行业资料-天天文库。
1、UnitⅡ.VacuumPumpsVacuumpumpsbeconcernedwith与…相关pumpingmechanism:loweringthemoleculesnumbercompression-expansion:pistonpump(活塞)liquidringpump(液环)rotarypumpRoot’spumpDragbyviscosity(黏性):vaporejectingpumpDragbydiffusioneffect:vapordiffusionpumpmoleculardrag:molecular
2、pumpionizationeffect:ionpumpphysical/chemicalsorptionpump:sorptionpump,cryopump(低温),gettering(吸气)pump2.1PrinciplesofpumpingAsortofpumpGastransferpumpsremovegasparticlesfromthesystem.Therearerotaryvanepump,turbomolecularpumpanddiffusionpumpingastransferpumps.Entrap
3、mentpumpsinwhichgasparticlesthathaveenteredfromthesystemaretrappedeitherchemicallyorphysicallywithinthepump.Therearesputterionpump,sublimationpumpandsorptionpumpinentrapmentpumps.Vacuumpumpscanbeclassifiedaseithergastransferpumpsorentrapmentpumps,accordingtotheiro
4、verallpumpingmechanism.VACUUMPUMPINGMETHODSSlidingVaneRotaryPumpMolecularDragPumpTurbomolecularPumpFluidEntrainmentPumpVACUUMPUMPS(METHODS)ReciprocatingDisplacementPumpGasTransferVacuumPumpDragPumpEntrapmentVacuumPumpPositiveDisplacementVacuumPumpKineticVacuumPump
5、RotaryPumpDiaphragmPumpPistonPumpLiquidRingPumpRotaryPistonPumpRotaryPlungerPumpRootsPumpMultipleVaneRotaryPumpDryPumpAdsorptionPumpCryopumpGetterPumpGetterIonPumpSputterIonPumpEvaporationIonPumpBulkGetterPumpColdTrapIonTransferPumpGaseousRingPumpTurbinePumpAxialF
6、lowPumpRadialFlowPumpEjectorPumpLiquidJetPumpGasJetPumpVaporJetPumpDiffusionPumpDiffusionEjectorPumpSelfPurifyingDiffusionPumpFractionatingDiffusionPumpCondenserSublimationPumpPUMPOPERATINGRANGES10-1210-1010-810-610-410-2110+2P(mbar)RoughVacuumHighVacuumUltraHighV
7、acuumVenturiPumpRotaryVaneMechanicalPumpRotaryPistonMechanicalPumpSorptionPumpDryMechanicalPumpBlower/BoosterPumpHighVac.PumpsUltra-HighVac.Pumps2.2parameterandclassificationultimatepressurelowestpressureatitsinletleakagevapourpressurepressurerange(usefulpumpingac
8、tion)adjacent相近的pumpingspeed(functionofpressure)Thepumpingspeedisthevolumetricflowthroughthepump’sintakeport.specificexhaustpressureselectivity抽气选择性comp
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